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Compact 5" Split Vacuum Furnace with Separated Temp. Controller (1200°C Max ) - OTF-1200X-S-5

Compact 5" Split Vacuum Furnace with Separated Temp. Controller (1200°C Max ) - OTF-1200X-S-5

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Product Name Compact 5" Split Vacuum Furnace with Separated Temp. Controller (1200°C Max ) - OTF-1200X-S-5
Sale Price Call for Price
Product Code OTF1200XS5
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(Upgrade to Eurotherm Temperature controller)

 

OTF-1200X-S-5 is a UL certifiable compact and energy-saving split tube furnace with a max. working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for rubber hose connection allows heating samples in the vacuum or flowing gas. The built-in precision temperature controller can provide up to 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "diameter.   


SPECIFICATIONS:



Furnace Structure
  

  •      •  Double-layer steel structure.
  •      •  High purity Al2O3 fibrous insulation with Max. energy saving.
  •      •  High purity alumina coating on refractory ceramics for longer service life.
  •      •  This furnace can be converted into a vertical furnace upon request.

Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1000°C (continuous)
Max. Heating Rate
≤ 20 °C/min

Heating Zone Length



  •      •  12 " (300mm), single zone.
  •      •  Constant Temperature Zone
    •          º  100 mm length (+/-1ºC )( click drawing below for temp profile )
    •          º  140 mm length (+/-2ºC ): ( click drawing below for temp profile )


Temperature Controller

Unit


  •      •  PID automatic control via solid-state relay with 30 steps programmable.
  •      •  Built-in Over Temperature and Thermal-couple Failure Protection.
  •      •  Optional: The furnace may be operated by PC with installing a control module. Please order
             an 
    MTS02-B control module at extra cost. 
                             
      

Advanced Temperature Controller (Optional)




  •      •  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package
             is
     available at the options bar. Click for detail information about the MTS02-Y software kit.
  •      •  You may upgrade the temperature controller to the Eurotherm Temperature Controller with +/-0.1 °C
            accuracy. 
    This package includes a Eurotherm programmer, a communication cable (RS485 - USB)
            and a software CD. Click the pic left to view the full spec of the Eurotherm 

Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo

Tube Size

Vacuum Sealing

              
Left Flange     Right Flange


Optional Hinged Type Flange at extra cost


  •      •  One pair of SS 304 vacuum flange with double high-temperature silicone O-ring is Included.
            (With support fixture) (click pic left for detail).
    •          º  KF25 port is built-in the right side flange to connect a vacuum pump.
    •          º  Vacuum gauge, gas inlet valve, and spare 1/4 thermal couple feed-through are built-in left
                  side flange.
  •      •  The vacuum level can reach 10-2torr (by a mechanical pump).


  •      •  Option 1:Water cooling 5" flange with Support Fixture,  which allows the furnace to achieve1200°C
            (Pic 1)
  •      •  Option 2:   Hinged type flange for easy sample loading( Pic 2-3, click pic 3 to order )
  •      •  Option 3: optional Quartz blocks and optional Quartz Boat are easy to build clean and high-vacuum
            system. 
  •      •  Option 4: A second temperature as a monitor can be added with additional cost applied. ( Pic 4)
  •       pic 1               Pic 2 pic 3 pic 4

 
Fitting Ports
&
Optional Parts

  •      •  You may need a vacuum valve at the vacuum port click picture left to order ).
  •      •  You may click the pictures in below to order furnace with a vacuum pump and a temperature
            calibration kit.

  •          
       
         
       


Pressure Measurement / Monitoring

  •      •  Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is
             included.
  •      •  OPTIONAL: A gas-type independent (above 10mbar) digital vacuum gauge with a wide range
            between
     3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge 
            reduces the risks of chamber explosions
     caused by the incorrect reading of gas pressures due
            to
     gas-type dependency.
                           


Optional Insert-able Thermal-couple


 

  •      •  A K-type insert-able thermocouple can be inserted through the flange to monitor the temperature
            inside the tube. Click the picture below to order
  •      •  Heating furnace is available for spare and replacement ( click on the right picture below).
  •      •  You may order flange support to avoid tube rotating ( click Pic below right )
                                  


Dimensions



  •   Click the picture to see detail.

Net Weight of Furnace
48 Kg
Shipping Weight & Dimensions
228 lbs; 48"x40"x37"

Warranty 

One-year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order replacements at related products below.) 


Laptop, software & WiFi Control(Optional)

  •      •  Laptop, software & WiFi Control(Optional)Brand new laptop with Microsoft Windows 10 and  
             Microsoft Office 2013 (30 days free trial) for immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature 
            profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters of operating range.
  •      •  The above features are available upon request at an extra cost (up to $1,000). Please contact us for
             more information.
  •             



Compliance

  •      •  CE Certified
  •      •  NRTL or CSA certification is available upon request at the extra cost
                     


Application Notes & Warning



  •      •  Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars
            / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C 
    The flow rate for gases
            should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
            pressure to below 3 PSI for safe operation.
     
    Click here to learn the installation of a gas regulator.
  •      •  How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
  •      •  For safety, you may consider putting the small tube furnace inside a fume hood.
            ( click picture left to see )



Operation Instructions




          Demo Video