Mass Flow Controller inside
Note:Other range MFC can be
customized at extra cost upon request.
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• Two Precision Mass Flow Controller ( MFC) in side )- • Working Temp. : 5~45 ºC
- • Max. Pressure: 3x106 Pa
- • Accuracy: ±1.5% FS
- • Liner: ±（0.5-1.5）%F.S.
- • Duplicate accuracy: ±0.2%F.S.
- • Controlling Range:
- º Controller 1: 1~ 99 SCCM
- º Controller 2: 1~199 SCCM
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Power 
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• Voltage: AC 208 - 240V Single phase 50/60Hz- • Power: 100 W in total
- • May order a 100W transformer to operate at 110VAC ( Click Pic below to order )
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PLC Touch Screen
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• 6" color touch screen control panel to make parameter setting at easy.- • Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included
for remote operation by PC, not compatible with LabVIEW for now.
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| Mechanical Pressure Gauge | Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid) |
| Needle Valve | 316 Stainless Steel |
Gas Pipeline
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• One stainless steel gas mixing tank is built in- • Internal pipeline: 1/4" O.D stainless steel
- • External pipeline: 1/4" O.D PTFE
- • Gas Mixing Tank: Φ80X120mm
- • Stop Valve & Fittings：
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Dimensions & Weight
| - • Dimension: 360 mm L x 300 D mm x 190 H mm
- • Weight: 8.4Kg
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• All components are CE certified - • NRTL (UL61010) or CSA certification is available at extra cost.
（ please click marks below to learn details )
 
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Warranty | One year limited with lifetime support |
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Oxygen Monitoring ( Optional)
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An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:
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CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD
  
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