Working Voltage | AC 220V Single phase 50/60Hz |
Power | 100 W |
PLC Touch Screen
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• All parameters of ALD vapor pulse time and Gas flow are controlled by PLC via a 6" touchscreen
panel in a mobile cart
- º Control Two ALD valves with pulse duration time and cycling with microsecond precision
- º Control For channels gas delivery with ±0.2%F.S via MFC
- º Display vacuum pressure
- º Other parameters upon request of the customer
- º Please click picture left to see control interface
- • RS485 Port and a supplied software are included for remote operation by PC.
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ALD Valves
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• Two ALD valves are required to deliver two type of vaper precursors ( not included )- • You may use your own ALD valve or click the picture below to order from us
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Mass Flow Controller
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• Four MFC is included to deliver 4 types of carrying gases independently or mixing
- º Controlling Range:
- º Controller 1: 0~100 SCCM
- º Controller 2: 1~199 SCCM
- º Controller 3: 1~199 SCCM
- º Controller 4: 1~499 SCCM
- º Note: Other range MFC can be customized at extra cost upon request.
- • Working Temperature: 5~45 ºC
- • Max. Pressure: 3x106 Pa
- • Accuracy: ±1.5% FS
- • Liner: ±（0.5-1.5）%F.S.
- • Duplicate accuracy: ±0.2%F.S.
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Gas Pipeline
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• One stainless steel gas mixing tank is built in- • Internal pipeline: 1/4" O.D stainless steel
- • External pipeline: 1/4" O.D PTFE
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| Gas Mixing Tank | Φ80X120mm |
Stop Valve & Fittings |
• 4 needle valves made of 316 Stainless Steel are included- • Φ1/4” Swagelok Tube Fitting
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| Dimensions | 600mm(L) x 745mm(W) x 700mm(H) |
Compliance |
• All components are CE certified - • The unit can pass TUV(UL61010) or CSA certification at extra cost.
（ please click marks below to learn details )
 
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Warranty | One year limited by lifetime support |
Optional |
• You may consider ordering bubbler or vapor delivery system by click picture below- • We can help you to connect the ALD control unit with MTI tube furnace at extra cost
   
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