Feasure | 4 Mass Flow Controller and 4 Monitor |
Power | 45W |
Output Power | +15V ±5% 600mA - 15V ±5% 1.2A |
Volatage | AC 220V ±10% 50/60Hz |
Mass Flow Controller |
Voltage: 185~245V 50/60Hz
Max. Output Power: 18W
Working Temperature: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Controlling Range:
- • Controller 1: 0~100 SCCM
- • Controller 2: 1~199 SCCM
- • Controller 3: 1~499 SCCM
Other range can be customized at extra cost. Please email to info@mtixtl.com
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| Mechanical Pressure Gauge | Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid) |
Dimension |
• Dimesion: 483 × 140 × 320 mm
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| Weight | 7.5KG |
| Compliance | CE certified |
| Warranty | One year limited with lifetime support |
Operation
Instruction |  |
Oxygen Monitoring (Optional)
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An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or
reducing oxidation. Please click the picture below to learn more:
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Related Products |
CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD
 
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