This is a 8'' Dia. Pinned Shower Head for Uniform Gas Delivery In CVD Chamber. It is a necessary assembly for developing CVD film over larger size wafers upto 8'' dia.
Specifications:
Body Materials
Aluminum 3003
Gas Feeding Tube
9.5mm O.D x 6mm I.D
Pin Hole Size
1mm Dia.
Mounting
Three 1/8 BSPP (F) mounting holes on the back of the shower head.