Mobile Cart Structure
| - • Inside: turbo-pump with rotary vane pump with vacuum pressure sensors and auto shut off valve
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Power
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• Three phase AC 380V ± 10%, 50/60Hz- • 2.5 KW power consumption
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Pumping Speed
& Vacuum Limit
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• Turbo-pump 700 L/S- • Vacuum pressure: 10E-7 Torr without connecting to any chamber
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Flange Size
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• CF160 from turbo-pump- • KF 40 for connecting to the outside vacuum chamber
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Working Range
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From 750 Torr to < 5.0 E-7 Torr with the proper connection at room temperature. The 5.0 E-6 torr can be achieved with MTI 8" - 15" O.D tube furnace.
  
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Weight | |
Dimensions
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•  Dimensions: 1000 X600 X 1550mm
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Warranty |
One year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed as below:
- • Pumping of corrosive or explosive media.
- • Pumping of condensing vapors.
- • Pumping of liquids.
- • Pumping of dust.
- • Operation with improper high levels of insulated heat input.
- • Operation in potentially explosive areas.)
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Compliance |
• CE Certified - • NRTL certification is available upon request.
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