Adixen's ACP"G"version dry vacuum pump is specially designed for pumping traces of corrosive gases, with inert gas purge protecting the bearings. Such a dry pump is optimized for the use of various CVD applications when corrosive gas is presented. It is an excellent solution for pumping MTI CVD systems.
Features
Benefits from the inert gas purging feature, the pumping gases can be diluted prior to the exhaust.
No particle contamination:The frictionless pumping module is optimized to operate without internal lubricant and provides an outstanding oil-free vacuum with no hydrocarbon vapor backstreaming. Without any seals between rotor and stator, no particles are generated.
High reliability: The absence of wearing parts inside the pumping module allows for unsurpassed long-term stability and high reliability in even the most demanding applications.
Constant performances:The frequency converter drove motor provides constant rotational speed, thus stable pumping speed and consistent ultimate pressure are achieved all over the world.
Low maintenance cost:ACP pumps require overhaul only 20,000 hours of operation for the ACP 28G resulting in low cost of ownership.
Condensable vaporability:High flow gas ballast ports and drainable silencers allow the ACP to pump high amounts of condensable vapors (up to 1,000 g/h of pure water vapor).
Cold trap condensable ability: Dry-ice and alcohol will cool the cold trap to -75°C, thus trapping most volatile materials.
Complete accessories included for immediate use
Specification
Peak Pumping Speed
16 CFM (27 m3/h)
Ultimate Pressure with Purge
0.075 Torr (10 Pa) Note: The ultimate vacuum level by the pump may vary from chamber to chamber in terms of size and sealing condition.
Ultimate Pressure w/o Purge
0.023 Torr (3 Pa)
Cold Trap Vacuum Compatibility
5E-4 Torr (0.067 Pa)
Power consumption
• 700W at ultimate pressure
• 1200W at atmosphere
Ambient Temperature
12 - 40 ºC
Inlet Port
KF25 Flange
Exhaust Port
KF25 Flange
Inlet & Outlet Port for Cold Trap
KF40 Flange
Port for N2 Purge
1/4'' G
Power Supply
110V - 240VAC, 50/60Hz
Max. helium leak rate
< 3.75E-7Torr/s
Weight
40Kg
Dimensions for pump
647 x 193 x 322mm
Accessories included
• One 1 meter long SS below with KF25 adaptor
• Two KF25 quick clamps
• Two KF40 quick clamps
• Two KF40 to KF25 Reducer Union
Warranty
One year (Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially:
• Pumping of condensing vapors.
• Pumping of liquids.
• Pumping of dust.
• Operation with improper high levels of insulated heat input.
• Before switching off, isolate the pump from the installation and let it run for 1 hour with gas ballast opened. This "Pump Stop" procedure is very important to remove the condensable vapour from the pump and keep it healthy for the next run.
• The ultimate vacuum level achievable by the pump may vary according to the chamber size and sealing condition.
• For the use with flammable gases, the user must dilute the gases below the lower explosion limit to avoid the risks of explosion. Please click underline to learn thelower/higher explosion limitsof various kinds of flammable gases.
• When using vacuum pumps, it is recommended thatTraps & Filtersare used to minimize exhaust, protect the specimen environment and also the vacuum pump itself.
• Protect the internals parts of the vacuum pump from being damaged by condensed vapors and small particles by connecting a cold trap (included) or particle trap to the pump foreline ( please click on the pictures below for details ).
• Please choose a vacuum gauge by click picture below right
