Pfeiffer's ACP series dry pump with 226L/min (3.7L/s) vacuum rate meets the requirements of applications where clean and dry vacuum is needed, for example, when using MTI's tube furnace for PECVD or graphene CVD growth. Feature
• No particle contamination:The frictionless pumping module is optimized to operate without internal lubricant and provides the outstanding oil-free vacuum with no hydrocarbon vapor backstreaming. Without any seals between rotor and stator, no particles are generated.
• High reliability: The absence of wearing parts inside the pumping module allows for unsurpassed long-term stability and high reliability in even the most demanding applications.
• Constant performances:The frequency converter drove motor provides constant rotational speed, thus stable pumping speed and consistent ultimate pressure are achieved all over the world.
• Low maintenance cost:ACP pumps require overhaul only 20,000 hours of operation for the ACP 15 resulting in low cost of ownership.
• Condensable vaporability:High flow gas ballast ports and drainable silencers allow the ACP to pump high amounts of condensable vapors (up to 1,000 g/h of pure water vapor).
• Cold trap condensable ability: Dry-ice and alcohol will cool the cold trap to -75°C, thus trapping most volatile materials.
• Complete accessories included for immediate use
Specification
Pumping speed
3.7 L/s
Ultimate pressure
• 2.2E-2 torr (3 Pa) • Note: • The ultimate vacuum level by the pump may vary from chamber to chamber in terms of size and sealing condition.
• Cold Trap for Recovering Condensables with KF25 connection- EQ-CCT-KF25-LD
Warranty
One year (Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially:
• Pumping of corrosive or explosive media.
• Pumping of condensing vapors.
• Pumping of liquids.
• Pumping of dust.
• Operation with improper high levels of insulated heat input.
• Before switching off, isolate the pump from the installation and let it run for 1 hour with gas ballast opened. This "Pump Stop" procedure is very important to remove the condensable vapors from the pump and, therefore, keep it healthy for the next run.
• The ultimate vacuum level achievable by the pump may vary according to the chamber size and sealing condition.
• To protect the environment & human health, please use Traps & Filters to minimize exhaust.
• To protect vacuum pump from damage by condensed vapors or small particles, please connect a cold trap (included) or particle trap to the pump foreline ( click on the pictures below for details ).
• When switching on the pump, if the temperature is less than 12c or over 40 c, the pump does not start. The pump will start automatically when the temperature is back in range.
• Please choose a vacuum gauge by click picture below right
