EQ-MFC-7B is a cost effectiveMFC forMTI's CVD/PECVD/Graphenefurnace to control the gas flowing rate for different research purposes.
• MFC are standard calibrated by N2 while it is out of factory,other gas calibration can be approximated by converting of conversion factorsof our instruction,
• Other gas calibration MFCcan be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO.
• Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only
• Ideal for vacuum coating and other gas mixture applications.
• Internationalstandard DB15 pinfitting;connects to MTI Furnaces withSwagelok1/4 fitting
• Note： This MFC is for replacement of MTI gas mixing and delivery system at related product below. In order to operate it independently, you need order EQ-MFC-COM
Specification
Full scale range (N2)
( 0～100,200, 500, 1000, 2000, 5000)SCCM
Other range can be customized at extra cost, please email to info@mtixtl.com
