Full scale range (N2) | ( 0～100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com |
Accuracy | ±1.0% S.P. (≥35% F.S.) |
±0.35% F.S.(＜35% F.S.) |
Repeatability | ±0.2% FS |
Linearity | ±0.5% FS |
Response Time | ≤1sec |
Valve Rest Position | Normally Closed or Normally Open |
Temperature Coefficient | Zero: ≤±0.05% F.S./℃ Span: ≤±0.1% F.S.℃（≤30 SLM） Span: ≤±0.2% F.S.℃（＞30 SLM） |
Zero Drift | ＜0.6%F.S. per year without autozero |
Surface Finish(Ra) | 25Ra |
Operation Temperature | （5～45）℃ |
Communication Interface for input Signal | Digital: RS485 DeviceNetTM Analog:(0～5)VDC or (4～20)mA |
Communication Interface for Output Signal | Digital: RS485 DeviceNetTM Analog:(0～5)VDC or (4～20)mA |
Power Supply | ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) |
Electronic Connector | D-sub 9 pins male, D-sub 15 pins male, DeviceNetTM male |
Differential Pressure | (0.05～0.35) Mpa（≤10000SCCM） (0.1～0.35) Mpa（20000SCCM,30000SCCM） (0.2～0.45) Mpa（50000SCCM） |
Max Pressure | 3MPa |
Leak integrity | 1×10-9 atm·cc / sec He（1×10-10 Pa·m3 / sec He） |
Seals Materials | Viton; Neoprene |
Surface Chemistry (EP only) | —— |
Fittings | Swagelok1/4” |
Weight | 1kg |
