Features |
• Designed and made by Switzerland-based INFICON- • Gas-type independent above 10 mbar - allows safe venting with any gas mixture
- • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens process cycle
- • Versatile mounting orientation provides engineering freedom in tool design
- • fully ceramic coated sensor unit for highly corrosive applications
- • Easy to exchange plug & play sensor element with onboard calibration data guarantees high
reproducibility and low cost of ownership
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| Power Connection | - • 9 pins D-sub connector.
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| Power Adapter | - • One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V.
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| Measurement Range | |
Accuracy |
• 5×10-4 … 1×10-3 mbar (N2) ±50% of reading- • 1×10-3 … 100 mbar (N2) ±15% of reading
- • 100 … 950 mbar ±5% of reading
- • 950 … 1050 mbar ±2.5% of reading
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| Display | - • Digital display (20x14 mm) with measurement unit Torr
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| Gauge Fitting | - • Small Foot-Print with KF16 port
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| Dimensions | - • 46 mm×28 mm×126 mm (L x W x H)
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| Shipping Weight | |
Warranty |
• One year limited manufacturer warranty, please contact vc.service.usa@inficon.com for information.
- • In the case of severe contamination or malfunction, the sensor can be replaced, please read
the instruction for details. Replacement sensor is offered at $574/each)
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Compliance | |
Calibration |
The pressure gauge is manufactured calibrated base on PTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request.
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Application Notes |
• General vacuum measurement and control in the Medium Vacuum Range
(Range 1.0E-4 Torr to ATM).- • Pirani gauges used in a clean environment can effectively operate above 5.0E-5 Torr range.
- • If your tool requires effective reading in the 1.0E-5 Torr or lower, please select Pirani/Cold Cathode
gauge with measurement range from 3.75E-9 to 760 Torr - • Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click left
picture below to order replacement part.
 
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Operation Instructions
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