This is a turn-key solution for precisely controlling the vacuum pressure in a vacuum chamber/system. Benefits from the motorized valve and wide range vacuum measuring gauge, the input gas flow can be precisely regulated in order to maintain certain vacuum pressure range from 1.0E-5 to 760 Torr, guaranteed.
SPECIFICATIONS
Controller
• Eurotherm nanodac graphical controller/recorder
• Pressure control range from 1E-5 to 760 torr (mmHg).
• Varies vacuum pressure units: mbar, bar, pa, kpa, etc.
• PID control and program/set point control. Pressure control accuracy +/- 0.0001 torr.
• Full PC configration. Software is provided. RS485 communication port.
• Two channels monitoring and controlling the pressure and gas flow rate.
• Overflow and overpressure protection and alarm message/signal output.
• Remote access avaiable via Ethernet at extra cost.
Pressure Gauge (Not included)
• Flange size: DN 25 ISO-KF, stainless steel
• Measurement range from 3.75E-9 to 760 Torr
• Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron)
• Corrosion-resistant
• Maximum pressure: 3,000 Torr (refers to inert gasses)
• Operating temperatures: 5-55 °C
Motorized Valve
• Built in liner control motorized gas inlet valve.
• 1/4 316 stainless steel Swagelok type gas inlet and outlet connectors.
Application Notes
• The motorized valve is used together with a control unit for controlling the pressure in a vacuum system, with a variable gas flow (upstream control) for maintaining a desired vacuum pressure. More specifically, the control valve regulates the gas inlet of the vacuum system. The valve plate moves in the closing direction when the pressure in the vacuum system rises, vice and verse.
Upstream control
• This turn-key solution can be used with most of the vacuum pumps available on the market, such as turbo, oilless/dry, oil, diffusion pumps.
