| Power | - Total 2000W
- 208-240VAC, Single phase, 50/60Hz
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Microwave
| - Frequency: 2.45 GHz ±25 MHz
- Power Output: 1400W
- Microwave leaking: ≤ 3 mW/cm² at 1 meter away.
- One digital power controller is built in to adjust output power from 10 - 100%
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Heating Module and
Processing Tube
| - Ni-Cr-Al wire heating coin with 80 mm ID is installed inside a fibrous alumina module (Pic. 1)
- The heating coil is placed inside the microwave chamber
- 2" Fused quartz processing tube with a mixing blade in the center (Pic. 2 and Pic.3)
 Pic. 1  Pic. 2  Pic.3
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Flanges & Vacuum
| - One pair of vacuum flange is included to seal the quartz tube
- KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
- One digital vacuum gauge is included for vacuum control ( Pic. 2)
- Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
- The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump.
 Pic. 1  Pic. 2  Pic.3 |
Inline Swivel &
Rotary Speed
 | - Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating
- Rotation speed: Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable
- A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank
- Click the picture left to see detailed specs
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Working Temperature | - Max. 1200ºC < 30 minutes with heating module assisted
- Min. 800ºC with heating module assisted
- ≤1100ºC continuous with heating module assisted and Plasma
- Heating rate: 1 ~20°C / min programmable
- ~750ºC heating by microwave only without temperature control
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Temperature Controller
| - 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
- SCR temperature control
- Over-temperature and thermal couple broken protection
- Control accuracy +/-1.0 ºC
- K-type thermal couple inserted through the flange
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Net Weight | |
Dimensions
| - Microwave: 560(L) x 410(W) x 340(H) mm
- Total depth with tube and flange: 780 mm
- Controler: 600(L) x 520(W) x 265(H) mm
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Warranty | - One-year limited warranty with lifetime support.
- Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
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Compliance | - CE Certified
- NRTL or CSA certification is available upon request
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Operation Video
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