•8" wafer boat is made of ultra-high purity quartz (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 8" diameter in each boat •Design for diffusion, oxidation and annealing 4" Si wafer •Can fit in MTI GSL1100X8 tube furnace •Click picture below to see detail mechanical drawing
Drawing of 8" quartz boat in mm ( length 180 mm )
8" wafer with quartz boat can be place into 8.5" tube
