•4" wafer boat is made of ultra-high purity quart (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 4" diameter x 0.5 mm thickness in each boat •Design for diffusion, oxidation and annealing 4" Si wafer •Can fit in MTI OTF1200X6 tube furnace
Drawing of 4" quartz boat in mm ( length 180 mm )
4" wafer with quartz boat can be place into 5" tube
