•Two vacuum pumps and vacuum pressure sensor and display are
 installed on bottom mobile cart case

•One rotary mechanical pump as first stage vacuum for
 achieving vacuum of 10^-2 torr
•One molecular pump as second stage for achieving vacuum
 of 5×10^-7 torr.
•Digital vacuum display installed in mobile bench will show
 vacuum pressure both of first stage and second stage
•Precision vacuum sensor installed on stainless steel flange
 of processing tube
•stainless steel hose connects vacuum sensor with vacuum
 pumps

•Pumping Rate: 4 L/S
•Motor Power: 400 W
•Ultimate Pressure: 6×10^-2 Pa

•Pumping Rate: 100 L/S
•Ultimate Power: 6×10^-6 Pa
•Startup Time: < 2 Min.
•Rated Speed: 4300 RPM
•Cooling Mode: Air/Water Cooling

•Voltage: 200~240 V
•Output Power: 250 W
•Acceleration Time: 3 Min.

•Output Frequency:

•704 Hz±10% (High Speed)
•430 Hz±10% (Low Speed)

•Working Voltage: 220 V/50~60 Hz
•Resistance: 85 Ω
•Automatic Protection: >10 Pa
•Ionization Gage Measurement Range: 100~10^-5 Pa
•Pirani Gage Measurement Range: 105~10^-1 Pa

•Easy-off Flange-Interface
•Leak Rate: 5×10^-9 Pa·m³/s

•Stainless Steel
•Electro polished
•Leak Rate:10^-9 Pa·m³/s

•Working Voltage: 185~245 V/50 Hz
•Max. Output Power: 18 W
•Controlling Range:

•Controller#1: 1~100 SCCM
•Controller#2: 20~200 SCCM
•Controller#3: 50~500 SCCM

•Working Temperature: 5~45 ºC
•Max. Pressure: 3x10⁶ Pa
•Accuracy: ±1% FS

•Four pressure gauges provide instant reading for mixing tank and
 3 channels pressure.

•Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)

•316 Stainless Steel

•Pipe fitting: 1/4" Swagelok
•12'' length 1/4" ID Nylon pipe for immediate use

•Φ80X120mm

•316 stainless steel needle valve, Φ1/4”