In typical CVD processes, BL-200 Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapour phase. Such a unit features two stainless steel needle valves with 1/4'' Swagelok Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure upto 0.15Mpa @ 250°C.
SPECIFICATIONS
Model#
BL-200-600
BL-200-1000
Vessel Material
316 Stainliss Steel
316 Stainliss Steel
Vessel Volume
600 ml
1000 ml
Vessel Dimensions
Φ 75 x 200 mm
Φ 75 x 300 mm
Overall Dimensions
130 x 90 x 440mm (L x W x H)
130 x 90 x 540mm (L x W x H)
Vacuum Gauge
-0.1 ~ 0.15 Mpa
-0.1 ~ 0.15 Mpa
Max. Pressure
0.15Mpa
0.15Mpa
Fittings
Two SS needle valves with 1/4" Swagelok Tube Fittings
Two SS needle valves with 1/4" Swagelok Tube Fittings
Max. Working Temperature
250°C
250°C
Application Notes
•Use 3'' Heating Jacket EQ-HC or Digital Controlled Hot Plate EQ-HP-250 to heat up the vessel, please find related products in below. •Vessel should be cleaned after each use to prevent contaminants and bacteria build up. •Never heat the source liquid inside the vessel near its boiling point or uncontrolled flow will result.
Warranty
One year limit manufacture warranty with life time tech. support