Gas, Liquid & Solid Powder Delivery/Formation

Bubbler / Evaporator for liquid sources & chemical precursors delivery in CVD processes (600 or 1000ml optional) - BL-200BL-200-6BL-200-10

Bubbler / Evaporator for liquid sources & chemical precursors delivery in CVD processes (600 or 1000ml optional) - BL-200
BL-200-6
BL-200-10

기본 정보
Product Name Bubbler / Evaporator for liquid sources & chemical precursors delivery in CVD processes (600 or 1000ml optional) - BL-200
BL-200-6
BL-200-10
Sale Price Call for Price
Quantity 수량증가수량감소
상품 옵션
 
  •  Product Options
Select Volume Item Number
600 mL BL-200-6
1000 mL BL-200-10
  • In typical CVD processes, BL-200 Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapour phase.  Such a unit features two stainless steel needle valves with 1/4'' Swagelok Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation.  Its leak-free 316 Stainless Steel vessel is able to withstand pressure upto 0.15Mpa @ 250°C.
  •  SPECIFICATIONS
Model# BL-200-600 BL-200-1000
Vessel Material 316 Stainliss Steel 316 Stainliss Steel
Vessel Volume 600 ml 1000 ml
Vessel Dimensions Φ 75 x 200 mm Φ 75 x 300 mm
Overall Dimensions 130 x 90 x 440mm (L x W x H) 130 x 90 x 540mm (L x W x H)
Vacuum Gauge -0.1 ~ 0.15 Mpa -0.1 ~ 0.15 Mpa
Max. Pressure 0.15Mpa 0.15Mpa
Fittings Two SS needle valves with 1/4"
Swagelok Tube Fittings
Two SS needle valves with 1/4"
Swagelok Tube Fittings
Max. Working Temperature 250°C 250°C
  • Application Notes
  • Use 3'' Heating Jacket EQ-HC  or Digital Controlled Hot Plate EQ-HP-250  to heat up the vessel, please find related products in below.
    Vessel should be cleaned after each use to prevent contaminants and bacteria build up.
    Never heat the source liquid inside the vessel near its boiling point or uncontrolled flow will result.
  • Warranty
  • One year limit manufacture warranty with life time tech. support