Function | Two Channels | Three Channels | Four Channels | Customised Four to Nine Channels |
Computerized
Mass Flow Controller
Note:Other range MFC can be
customized at extra cost upon request.
| Working Temp. : 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1.5% FS
Liner: ±（0.5-1.5）%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
- Controller 1: 1~199 SCCM
- Controller 2: 1~499 SCCM
| Working Temp.: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1.5% FS
Liner: ±（0.5-1.5）%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~499 SCCM
| Working Temp.: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1.5% FS
Liner: ±（0.5-1.5）%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~199 SCCM
- Controller 4: 1~499 SCCM
| Working Temp.: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1.5% FS
Liner: ±（0.5-1.5）%F.S.
Duplicate accuracy: ±0.2%F.S.
Select Range from below to make Customised Four to Nine Channels:
- 0~100 SCCM
- 1~200 SCCM
- 1~500 SCCM
- 1~1000 SCCM
- 1~2000 SCCM
- 1~5000 SCCM
|
Working Voltage | AC 220V Single phase 50/60Hz |
Power | 23W |
PLC Touch Screen
| - 6" color touch screen control panel to make parameter setting at easy.
- Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now.
|
| Mechanical Pressure Gauge | Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid) |
| Needle Valve | 316 Stainless Steel |
Gas Pipeline
 | - One stainless steel gas mixing tank is built in
- Internal pipeline: 1/4" O.D stainless steel
- External pipeline: 1/4" O.D PTFE
|
| Gas Mixing Tank | Φ80X120mm |
Stop Valve & Fittings | 316 stainless steel needle valve,
Φ1/4” Swagelok Tube Fitting |
| Dimensions | 600mm(L) x 745mm(W) x 700mm(H) |
