VTC-100B is CE certified tabletop spin coating device dedicated to spin coat small substrates up to 100 mm diameter.
The spin head actuator is a precision DC servo motor with accurate speed and acceleration control.
The substrate can be held by either mechanical clamps or by vacuum (for thinner objects).
The device has user friendly keyboard and LCD display for programming various parameters upto 9 segments.
Spin duration, spin speed and acceleration can be programmed from the front panel.
All components in the device are corrosion protected to make it clean room compatible.
New version comes with electric syringe is available in option bar-02/26/2014
SPECIFICATIONS
Structure
•Nylon chamber for anti-crossive operation. •One gas inet port on top of cover which can fill inert gas during coating •One oil-less vacuum pump is included in the standard package, please click here for specification details.
Vacuum Chuck & Vacuum pump
•Three sets of nylon anti-corrosive vacuum chucks for holding substrate upto 100 mm diameter. •One 120 L/min Oillless Vacuum Pump is included for immediate use ( click picture below right to see specs
Actuator
Brushless DC motor
Touch Panel with Digital Control
•5 ~ 8000 rpm spining speed programmable •Duration upto 99hours •Acceleration : 5 - 2000 rpm / sec adjustable •Accuracy : < 5 % •Digital control panel can store 9 programs and each program has 9 segments programmable for speed, acceleration, and spin duration （please sclick picture below-right to see typical program setting )
•AC 110V/220V (select in option table) •1000 W total
Gas Inlet
6 mm diameter gas inlet port allows customers to fill desire gases into the chamber, which can make coating under variable gas flow environment.
Product Dimensions
Net Weight
15 kg (33 lbs)
Compliance
CE Certified
Warranty
•One year limited with lifetime support •Rusting and damage due to improper storage condition or maintenance is not covered by warranty
Operation Manual & Video
Application Notes
•Please click here to review an article on "Spin Coater Theory and Processing" •In order to achive better coating quality, please consider cleaning substrates by plasma cleaner before coating •Using plasma-cleaner to treat substrate surface before coating can improve film quality. •The EQ-OFDP-2 is a tiny silent powerful diaphragm pump, which is made in Germany and provides an excellent vacuum performance, now it's only for you to have this pump.
