GSL-1600X-4-HVC2 is CE certified 4" diameter single zone alumina tube furnace with high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600 ºC.
Specifications
GSL-1700X series tube furnace
Casing
•Double layer steel casing with air cooling. •Two cooling fans inside to keep case temperature < 55 °C. •High purity Alumina refractory chamber •Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel. •Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
•Max. Heating Temp. : 1650 °C •Continuous Working Temp. : 1600 °C
Heat-up Rate
<= 5 °C/min
Heating Zone Length
•Heating zone length : 457 mm (18") •Constant Temperature Zone length : 150 mm (6") (+/- 1 °C)
Temp. Control
•PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments. •Temperature accuracy : ± 1 °C •Thermocouple : B type built inside the furnace
Vacuum Seal
•One pair of stainless steel vacuum flange with:
•one digital vacuum gauge •two needle valves •one KF-25 connector and KF-25 to KF-40 adapter for the high vacuum station. •one 1/4" Swagelok tube connector
Dimension
550 x 380 x 520
High Vacuum Station
Power
100 ~ 110 W
Rated Voltage
•AC 208 - 240V Single Phase, •50/60 Hz
Dimension
600 (L) x 600 (W) x 700 (H), mm
Structure
•Mobile cart size : 600 (L) x 600 (W) x 700 (H), mm •Max. Loading : 600 Lbs on top •Molecular pump control Panel : LCD digital •Inside : Pfeiffer vacuum pump made in Germany •Vacuum sensor is included
Control Panel
•One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button. •System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber. •Self protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum. •LCD screen - double lines parameters checking interface make the working easier to be handled.
•Made of 316 stainless steel •Gas mixing tank : Φ 80 X 120 mm •Dimension : 600 (L) x 600 (W) x 700 (H), mm •Three Channels MFC control panel (Click to enlarge) •The flow rate control range and number of gas routes are available for customization. Please contact us for detail information.
Power
18W per channel
Rated Voltage
•AC 208 - 240V, •Single phase, •50/60 Hz
Gas routes
Please select the number of gas routes in the option to update the price
Warranty
One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Compliance
•CE Certified •UL / MET / CSA Certification is available upon request, additional charges will apply •Temperature controller is MET and CE Certified •Transformer is UL Certified
Shipping Dimensions
Two cases in one plastic pallet
45 x 45 x 35 /case
Warning
The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
