•4" wafer boat is made of ultra-high purity quart (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 4" x 4" square x 0.5 mm thickness in each boat •Design for diffusion, oxidation and annealing 4" Si wafer •Can fit in MTI OTF-1200X-5L,VBF-1200X-H8, and OTF-1100X-8.5 tube furnace •The dimensions of the wafer boat please refer to design drawing