EQ-GSL-3F-PTFE is a three channel anti-corrosion gas mixing & delivery system. All parts coming in contact with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
Specifications
Floating meter
•Three anti-corrosive Floating Flow-meter made of PTFE material with s flowing rates of 10 - 1000 mL/min.
Valve
•Three needle valves made of PTFE material which controls gas out-let on front panel
Gas Mixing Tank
•1000 mL gas tank made of PTFE •Each channel gas will flow into the tank for mixing before flow-out
Pipe fitting
•Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel) •Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart •Two channel gases flow into a gas mixer container and one gas channel independent (please review manual for drawing) •Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent) •12' length 1/4" PTFE pipe is included for immediate use
Mobile Station
•Heavy duty Mobile Cart with four wheel and brake, where MTI small furnace can be put on the top •Size 600 mm (L) x 600 mm (W) x 650 mm (H) •Net Weight: 160 Lb •Max. loading weight: 500 Lb
Shipping
•Shipping dimension: 41 x 49 x 38 inch •Shipping weight: 200 lbs
Warranty
Two years limited with life time support
Application Note
•If your CVD processing involves corrosive gas, such as H2S, please consider to use PTFE flange on your tube furnace •Also, please choose anti-corrosion dry vacuum pump instead of oil vacuum pump
