GSL-1100X-8.5-S-UL is a ready-to-pass UL/CSA (UL61010 or SPE1000 certification) furnace.
It is single zone for 8.5" O.D fused quartz tube furnace and equips with vacuum flanges.
It is widely used for materials or chemical lab to sinter all types of new materials samples and anneal" semiconductor wafers (max. 6") under vacuum or other gases condition.
The temperature tubing furnace is controlled by a high precision controller with accuracy +/-1°C and 30 segments programmable up to 1100°C .
SPECIFICATIONS
Furnace structure
•Double layer steel casing with air cooling. •Four cooling fans are buit inside to keep temperature of outside case < 60ºC •High purity alumina fibrous insulation for max energy saving.
Thermal Block Placement
Input voltage
208 - 230 VAC Single phase
power
8 kW (50 Amps Air Breaker is required)
Fused quartz tube size
One quartz tube (8.5" O.D x 8.2" I.D x 40" Length) is included
Heating element
NiCrAl Resistance Wire
Working Temperature
•Max. heating temperature : 1100 °C •Continuous working temperature : 400 -1050 °C •Max. heating/cooling rate : 20 °C/min •Typical temperature profile at 800 oC (click picture below to see detail)
Heating zone
•Total heating zone length : 600 mm (24'') •constant temperature zone : 200 mm at the center (with +/-1°C)
Temperature controller
•One Precision digital controller with PID function and 30 segments programmable •Secondary temperature monitor has function of protection from over-temperature and broken T/C •K type T/C •Temperature accuracy : +/-1°C •Software and PC interface module is available at extra cost
Vacuum & Fitting Ports
•One pair of stainless steel vacuum seal flange with hinged type ( see picture below ) •One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port and 1/4'' feedthrough.
Vacuum pressure limit : depended on vacuum pump. (Usually 10-2 torr by mechanical pump). •Two Quartz tube blocks are included. •Two air cooling fans to keep flange temperature beow 70ºC •Water cooling flange is available upon request at extra cost
Cooling
Two 20 mm air cooling fans help dissipate heat of the flange.
Product dimension
1000 L x 680 W x 920 H mm
Net weight
250 Kg
Shipping dimension
60" x 60" x 55"
Shipping weight
350 Kg
Warranty
One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Certificate
•CE Certified •All electric components ( > 24 V ) are UL / MET / CSA certified •The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details )
Warning
The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
OPTIONAL ACCESSORY
Part No.
Description
Quick Link
EQ-KF-suite
KF-D25 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter) Also you may buy individually.
EQ-MTS02
Computerized temperature Control System
High vacuum station (Mechanical pump + turbo molecular pump.)
Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
