EQ-RTP1000-LV3C is a 4" I.D RTP (Rapid Thermal Processing) tube furnace with three flow meters and a machanical pump capable of producing up to 10-3 torr vacuum. It is designed for annealing semiconductor wafers, solar cells or any other samples up to 3" in diameter. EQ-RTP1000-LV3C is heated by 10KW halogen lamps with a max. heating rate of 120 oC/second. 50 segment precision temperature controller with +/- 1 ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. Three gas flow-meters and a vacuum pump are installed inside the mobile cart with connection to the RTP furnace.
Specifications
Furnace Structure
•Compact 4“ RTP Tube Furnace •Double layer steel case with mullite liner to eliminate the need for water cooling or air cooling
12" length with 4" constant temperature zone within +/- 1 °C uniformity
Working Temperature
•1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise the O-ring may melt) •Furnace can be heated to 1100 °C at 50 °C/second, and fast cooling by opening cover.
•PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. •Built in overheating & broken thermocouple protection. •Over temperature protection and alarm allows for operation without attendant(s). •+/- 1 ºC temperature accuracy. •RS485 Communications Port. •PC Control:
•A MTS-02control module is included for PC control on this furnace. •A laptop PC can be ordered for together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
Quartz Tube & Sample Holder
•Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length. •One 3" diameter AlN sample holder for annealing samples up to 3" dia. AlN has very high thermal conductivity which provides the best temperature uniformity in the sample area. •The sample holder is removable from the flange for using the RTP furnace with other purposes.
Vacuum Flange
•KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves and water cooling jacket. •Only requires water cooling in long running times at temperatures > 600 oC. •Circulating water rate: 0.5 m3 /hr. •Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed. •Insert-able thermal-couple for accurate measurement.
Water Cooling Jacket
•Cooling water is required. •Please make sure the flow rate of cooling water is ≥ 10 L/min, water temp. < 25 ºC;pressure > 25 PSI. •We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please click link on left to order separately) to save water. •Warning : This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.
Flow Meter
One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
Gas Mixer
•Three gas flow-meters (A: 10 - 100 mL/min;B: 16 - 160 mL/min;C: 25 - 250 mL/min flow rate and 4% accuracy FS) are installed inside the mobile case to monitor the flowing rate of each gas. •Four stainless steel valves are installed in side panel of mobile cart to control mixing gases and three inlet gases separately. •One pressure gauge is installed on gas mixer to monitor the pressure of mixed gas in tank.
Vacuum Pump
•Double Step Rotary Vane High Speed Vacuum Pump with max. vacuum pressure of 10-2 torr, 2TW-4C-220V •Stainless steel hose tube is included for connecting to tube furnace.
Dimensions
•RTP Furnace : 760 X 330 X 530 mm (30"W x 13"L x 21" H) •Gas Mixer : 600 mm (L) x 600 mm (W) x 650 mm (H)
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Compliance
•MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time. •Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. •Over temperature protection and alarm allows for operation without attendant(s).
Application Notes
Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
