CVD Equipment for Graphene & 2D



The material research community exploring 2D materials beyond graphene is rapidly expanding. Encouraging work has already been intensively reported from different material systems such as nitrides (e.g., h-BN), dichalcogenides (e.g., MoS
2), topological insulators (e.g., Bi2Se3 or Bi2Te3) and even oxides.  MTI is supplying  CVD equipment for graphene and 2D material.   Please click thumb picture below to find our standard CVD system.  If you have any customized requirement , please let us know.   We may use existing modules to build a system for you immediately


 
   Graphene Layer Growth  
   
            
Atmosphere Controlled RTP 
       Slidable RTP for Fast Cooling
            Dual Furnace Sliding
                 PECVD furnaces

   2D Material Growth by CVD

 
   
     
CVD for 2D Crystals  

               Two Zone  Hydrogen Tube Furnace
                 Slidable PECVD Furnace    
 

            Large-Area Graphene Growth
                 

   2D Material Growth by
   Sputtering

      
1"  RF Plasma Sputtering coating     
          DC/RF Dual-Head  2”  Sputtering    
                  WSe2 Target

 
   Related Substrate

                
Thermal Oxide Wafer     

               Single Crystal Copper  
     
 Crystal Substrate A-Z         
              

   Related Products

  •      •  Copper / Nickel Foil for Graphene Growth (150m length x
            150mm width x 25um thickness) - EQ-bccf-25u, please click
            pic.1 for details.

  •      •  After CVD, the graphene must be transferred from the metal
            catalyst to another substrate for most applications. By using
            the graphene transfer tape, the residue can be low. Please
            click pic.3 for details.

  •      •  You may order a  Compact  Liquid Vaporization Systems for
            better CVD, click pic.4 for details.
                       


   Reference Articles or video
  •      •  3D Graphene Growth on Nickel Foam, please click here to
             read.



 
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