Sapphire substrate is the popular substrates for III-V nitrides, superconductor and magnetic epi film due to less mis-matched lattice and stable chemical and physical properties.
Wafer size
10 mm x 5 mm x 0.5 mm thick
Orientation tolerance
•+/-0.5 Deg. •C plane orientation
Polished surface
substrate surface is EPI polished via a special CMP procedure with Ra < 5 A
2 side polished
Package
Each wafer is packed in 1000 class clean room with 100 grade plastic bag with wafer container.
Precaution
R plane sapphire wafer is easy to cleave compared with C plane's.Please handle it with a care