Features | OTF-1200X-S-Mist is a compact and economic MIST CVD system for epitaxial thin film or single crystal growth up to1200ºC. The furnace is integrated with a 1.7MHz ultrasonic mist generator and 2 channel gas delivery system |
Furnace
| - The splittable tube furnace with 1200oC Max. working temperature
- 200 mm length heating zone with 60 mm length constant temperature zone.
- 30 segments programmable temperature controller with +/- 1ºC accuracy
- Power: 1.2 KW, 120VAC ( +/- 10% ）， single phase， 50/60Hz
- Click the picture left to see detailed specs
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Quartz Tube & Sample Holder
 
| - Quartz processing tube with flanges and the size of OD 60 mm x ID 55 mm x L 600 mm is included
- One quartz sample holder is included, which can hold 4 pcs of 10x10x0.5 mm substrate at 45 degrees.
- Click Picture left to order spare
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Ultrasonic Mist Generator
 | - 1.7 Mhz ultrasonic generator is located in an airtight SS316 tank. ( click Pic left for specs )
- 3 levels of power output ( low = "1", liquid injection speed = 0.2 mL/min), (middle = "2", liquid injection speed = 0.4 mL/min), (high ="3", liquid injection speed = 0.6 mL/min). To achieve high atomizing quality, the syringe pump rate should be match with the power output level.
- 7 levels of time setting ("Out" indicator light), "1" = no limited timing, "2" = 30 min, "3"= 60 min, "4"= 90 min, "5"= 120 min, "6"= 150 min, "7" = 180 min
- A liquid syringe pump is equipped to inject automatically which comes with a 20 ml plastic syringe. The speed range for the liquid injection pump is 0.004 ml/min - 70 ml/min
- Temperature heating function addtionally installed upon request. The max. temperature can be up to 250 °C
- The mist generator is connected to a tube furnace via 1/4" stainless steel tube
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Gas Delivery System
| - Two Floating Flow-meter with a flow rate ranging from 16 to 160 mL/min
- One stainless steel mix tank built inside for better gas mixing
- Three Pipe fittings for 1/4" pipe (nylon or stainless steel)
- Three vacuum needle valves made of SS304
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Vacuum Pump ( optional )
| - KF 25 vacuum port is installed on the flange of the processing tube with a valve to connect to a vacuum pump
- A dry pump is strongly recommended for the longer service life of Mist CVD.
- Please click the picture left to order a pump if you need
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| Dimensions | Furnace with Tube： 1000 L x 400 W x 390 H (mm)
Ultrasonic Generator: 240 L x 220 W x 400 H (mm)
Syringe Pump: 220 L x 150 W x 160 H (mm)
Gas Delivery System: 360 L x 380 W x 200 H (mm)
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| Net Weight | TBD |
| Warranty | One-year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.) |
| Application | This kind of mist CVD can be used to grow Ga2O3 crystal with high quality |
Compliance | - CE Certified
- NRTL or CSA certification is available at extra cost.
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| Reference article | |
Operation Video
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