Features | OTF-1200X-Mist is a 1200ºC tube furnace integrated with an ultrasonic mist system for epitaxial thin film or single crystal growth via the mist CVD method. |
Furnace
| - The splittable tube furnace with 1200oC Max. working temperature
- 400 mm length heating zone with 125 mm length constant temperature zone.
- 30 segments programmable temperature controller with +/- 1ºC accuracy
- Power: 3KW, 220VAC ( +/- 10% ）， single phase， 50/60Hz
- Click the picture left to see detailed specs
- Note: working temperature can be upgraded to 1500oC by OTF-1500X-UL
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Quartz Tube & Sample Holder
 
| - A quartz processing tube with flanges and the size of OD 60 mm x ID 54 mm x L 1000 mm is included
- One quartz sample holder is included, which can hold 4 pcs of 10x10x0.5 mm substrate at 45 degrees.
- Click Picture left to order spare
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Ultrasonic Mis Generator
  | - 1.7 Mhz ultrasonic generator is located in an airtight SS316 tank. ( click Pic left for specs )
- 4 levels of ultrasonic power are for adjusting the mist amount
- Mist time is 30 - 180 minutes adjustable
- A liquid syringe pump is equipped to inject automatically which comes with a 60 ml plastic syringe. The speed range for the liquid injection pump is 0.004 ml/min - 70 ml/min
- The mist generator is connected to a tube furnace via a 1/4" stainless steel tube
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MFC Gas Delivery System
| - 4 channels MFC gas mixing and delivering station is included ( Click Pic left for specs)
- 2 channel gases are filled into stainless steel tank as carrying gas after mixing
- another 2 channels of gases are filled into a tube furnace as diluting gas after mixing
- MFC flow rate: 0 - 500 ml/ minute adjustable
- MFC flow accuracy: ±0.2%F.S
- Working pressure range: 0.1～0.5 MPa
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Vacuum Pump ( optional )
| - KF 25 vacuum port is installed on the flange of the processing tube with a valve to connect to a vacuum pump
- A dry pump is strongly recommended for the longer service life of Mist CVD.
- Please click the picture left to order a pump if you need
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Control Panel
| - Touch screen control panel to set operation parameters, including
- Temperature program and curve
- 4 channels gas flow rate
- Mist-generating level and time
- RS 485 port and PC operation software is available upon request
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| Dimensions | TBD |
| Net Weight | TBD |
| Warranty | One-year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.) |
| Application | This kind of mist CVD can be used to grow Ga2O3 crystal with high quality |
Compliance | - CE Certified
- NRTL or CSA certification is available at extra cost.
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| Reference article | |
Operation Video
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