GSL-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials , such as Ti, Al and Ir etc, also can be used for coating all kinds of materials.
which has four evaporation heater sources and coat two type of materials in same time at high vacuum upto 10-6 torr.
It is an excellent and cost-effective coating machine for research lab.
SPECIFICATIONS
Input & Output Power
•Input : 208 - 240 VAC, 20 A, 50/60 Hz, single phase •Total Power required : 8 KW ( including pump) •other 3 phase voltage is available upon request •Output : 5 VAC max. and 300A Max.
Vacuum Chamber
•Stainless steel chamber : 280 mm ID. x 375 mm Height, ( ~23 Liter) Sand blasting electrolytic polishing surface •100 mm observation window in fron of chamber •Hinged type door for easy sample loading •Manual operated shutters is on top each evaporation W boat , which allow evaporating 4 kinds of material one by one •4 KF40 ports buil in chamber for connecting to necessary device
Vacuum Pump
•High speed turbomolecular vacuum pump is included and connected to vacuum chamber. ( pls click picture left above )
○ Vacuum spped : 600 L/S ○ Vacuum lelvel : 5.0 x 10-6 torr ( after 40 minutes pumping ) ○ Limit vacuum : 5.0 x 10-7 torr ( after baking at 100 -150°C) ○ Leaking rate : 5.0 x 10-7 Pa. ○ Vacuum port : 150 mm diameter
Evapoation Source & Sample Holder
•Five water cold electrodes are feedthrough from bottom of chamber , which support four tungsten heating boats ( included ) •Tungsten heating boat has dimension 70 mm L x 12 mm W x 3 mm H。
Spare W boat is available at extra cost。 •Each top of boat has a manual operated shutter •Built in manual shutter allow evapration source to be used attenertively. •100 mm diameter rotating sample holder is on top of chamber with diameter 260 mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy •The distance between evaporation soource and sample holder is 150 - 300 mm adjustable
Thickness control
•One High Resolution Film Thickness Monitor and Controller is built in chamber •The accuracy of thickness control is 1.0 A
Control Unit
•Vacuum, thickness and power control are integreated into one control box •Control Unit is separated from vacuum chamber for easy moving •You may place the control unit on the top of vacuum station
Overall Dimensions
L 600 mm × W 860 mm × H 1500 mm
Net Weight
600 kg
Operation Instructions
Facility Requirement for Instalation
•Space : 250 SF with higheught > 6 feet •Power : 208 - 240 V AC , single phase with Max 10 KW ( 50A breaker) •Water : > 15 L/minure flowing water required for electrode cooling.
You may consider to order recirculating water chiller to save water by click picture below at extra cost.
Warranty & Certificate
•Two years limited warranty with lifetime support •CE certified
