| |
Round Al2O3 (0001) Wafer 10mm, 1" - 4"
Al2O3 single crystal substrate , <0001> 100mm Dia. x 0.9mm 1sp - ALC100D09C1
Specification
- Orientation:
C-plane off 0.35+/- 0.05o to M-plane leftwards from the Primary; 0 +/- 0.1o off
to A-plane
- Diameter:
100mm
- Thickness:
0.9+/-0.025mm
- Major
Flat: A-axis[11-20]+/-0.3o
- Major
Flat Length: 32.5mm +/- 1.5mm
- Surface
Finish:Front side: Epi- polished Ra=0.3 nm(by AFM); Back side: fine ground
(Ra:1.2 um)
- TTV:
= 20um, BOW=25um
|
