Furnace structure
| - Double layer steel casing with air cooling. The surface temperature of the case is < 70°C.
- Refractory fibrous alumina insulation liner for maximum energy saving.
- Heating element: NiCrAl Resistance Wire
- Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
- This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below (for 11'' O.D tube only)
- Electrical lid actuator provides easy & hassle free lid opening when seen through the tube chamber or tube replacement is needed.
 |  |  |  | Structure schematic
| 11" ceramic tube。 Click to order spare
| Holding 8" wafer | Electrical Lid Actuator |
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Heating zone | - Total heating zone length 1000mm (40")
- Three zones: 330 mm + 330 mm + 330mm (12" per zone)
- Constant temperature zone: 600 mm (if three zones are in the same temperature within+/- 5°C)
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Working temperature
| - Max heating temperature: 1100°C
- Max heating & cooling rate: 10°C/min
- SiC heating elements, total 36 pcs
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Temperature contro
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European Temperature Controllers (optional upgrade)
 | - 1 heating channel
- 1 programs of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Fused quartz tube
| - 15" O.D x 14.6" ID quartz tube with 73" Length, please select tube size in the option bar
- High purity quart tube, please click the bottom left picture to view.
- Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use
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Vacuum sealing & Flange
| A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump. Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting. - One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
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Optionals | - The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra cost The complete calibration kit includes (click the underline to see details):
- You may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )
- 4'' ~ 8'' large size quartz boats
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Rated Voltage
| - Three Phase, 208V AC, 50/60 Hz （ 3 phase 380V is optional）
- AWG 8# Power cord is included (without plug)
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Power consumption
| Max. 20KW |
Product Dimension
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Net weight
| 500kg |
Warranty
| - One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
- You may order replacement quartz tube at the link below
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Compliance
| - CE Certified
- UL / MET / CSA Certification is available upon request, additional charges will apply
- The temperature controller is MET and CE Certified
   
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| Installation Video | |
NOTE
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| Operation Instructions |  |
Warning
 | - Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa or 0.12 MPa (absolute pressure).
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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