• 
       •  280 mm O.D. x 260 mm I.D. x 310 mm Height quartz
          chamber for easy cleaning and sample loading
   
•      •  2" Dia rotatable evaporating sources for the uniform
          film coating
  
  
•      •  Tungsten coil heater and alumina crucible for high-
          temperature coating up to 1700 ºC
  
  
•      •  Precision temperature control with 30 programmable
         segments and +/- 1 ºC accuracy
  
  
•      •  A high vacuum can be achieved up to 1.0E-5 Torr via
          optional turbopump
  
  
•      •  Gas flow port and valve are built in for chamber
          purge and CVD possibility
  
  

• 
       •  Input voltage:  AC 208 - 240 V 50/60 Hz, single
          phase  ( 110V AC is available via 1500W
          transformer )
  
  
•      •  Input Power: 1,200 W
  
  
•      •  output power:: 12 V, and 30 A max current.
           Recommended working current <30 A
  
  
•      •  Power cable included without plug

• 
       •  Four Alumina Evaporating Crucibles with 3 mL each
          capacity. Four sources cannot be used at the same
          time. The multilayers deposit would be done one by
          one.
  
  
•      •  Tungsten coil heater with a thermocouple is built in
          at the bottom of alumina crucible (for temperature
          control (PIC. 1). Please refer to the left picture for
          dimensions
•          º  Standard S type thermocouple (included
              and installed) - heating from 200 ºC - 1500
               ºC (PIC. 2)
•          º  Optional B-type thermocouple (at extra
               cost) - heating from 1200 ºC - 1700 ºC
  
  
•      •  One digital temperature controller with 30
          programmable segments and +/- 1 ºC accuracy
          (PIC. 3)
  
  
•      •  The time settings of temperature controller are in
          seconds. Recommend to limit the temperature
          heating / cooling rate to 0.3 ºC/s (or 20 ºC/min)
          below 1200 ºC, and limit to 0.15 ºC/s (or 10 ºC/min)
          from 1200 - 1700 ºC
  
  
•      •  For continuous heating above 1300 ºC, please limit
          the operation time to less than 1 hour to preserve
          the service life of bottom flange O-ring
  
  
•      •  For fast coating up to 2000 °C, such as needed in
          Carbon coating, the user can remove thermocouple,
           alumina thermal block, and alumina crucible, load
           evaporation material directly into the tungsten coil
          heater, and use current manual control mode 
         (PIC. 4)
  
  
•      •  Four alumina crucibles (up to 1700 ºC) and two
          tungsten coil heaters are included. Please refer to
          the Optional section for ordering spare parts
  
  

 

                  

   

• 
       •  One 50 mm Dia. rotatable sample stage and its
          shutter are installed on top flange.
•      •  Rotating speed: 5 rpm
•      •  The distance from sample holder to evaporation
           source is adjustable from 40 mm to 85 mm
•      •  Please click here to learn how to adjust the position
          of the sample stage.
  
  

• 
  Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is available at extra cost, please click pic.1 for details
  
  

                      Pic.1

• 
       •  KF25 vacuum port is installed to connect to a
          vacuum pump
  
  
•      •  The highest vacuum may reach <1E-5 Torr by
          pumping overnight with optional Turbomolecular
          pump
  
  
•      •  A vacuum pump is required for coating. Please
         choose from the following Product Options
  
  
•          º  Double Stage Rotary Vane Vacuum
              Pump with vapor trap to eliminate the oil
              mist, which can reach vacuum up to 1.0E-2
              Torr for evaporating noble metallic
              materials, such as gold, silver, and organic
              materials. Anti-Corrosive Capacitance
              Diaphragm Gauge is included
  
  
•          º  Compact Turbomolecular Vacuum Pump
              System is able to provide vacuum level up
              to 1.0E-5 Torr for evaporating oxygen
             sensitive materials, such as Al. Mg, Li, etc.
             A combined Pirani and cold cathode gauge
             are included with pump to measure vacuum
             up to 1.0E-8 Torr
  
  

               

           

• 
       •  1/4 tube fitting is built in for chamber purge or
          forming gas processing
  
  
•      •  One needle valve is built-in to control gas flowing
           rate
  
  

• 
  Extra alumina crucible and tungsten coil heater can be ordered at MTI at extra cost (Click the pictures below)
  
  

           

• 
       •  CE Certificate
•      •  Click here to understand the certificate and
         condition.
  
  

                               

• One year limited warranty with lifetime support

• 80 kg

• 200 lbs, 40" x 30" x 32"

• 
       •  To achieve the high vacuum required for the
           evaporation of some materials, user can
  
  
•          º  Check the chamber, O-ring, and flange for
              any particle, fiber, or scratch. Use lint-free
              tissue wetted with isopropyl alcohol (IPA) to
              wipe clean the surface
  
  
•          º  Use heater tape to bake the chamber at
             150 ºC and pre-heat the coil heater and
             crucible at 500 ºC while pumping with the
             optional turbopump for at least 2 hours
  
  
•          º  Pump the chamber overnight without
              heating if a vacuum higher than 1.0E-5 Torr
              is needed
  
  
•      •  DO NOT start the heating program or manually
         ramp up the current without an enclosed chamber
         and a vacuum!
  
  
•      •  DO NOT release the vacuum or stop pumping when
          the coater is in evaporation operation! During the
          heater cool down, stop pumping or release the
          vacuum ONLY when the temperature is decreased
          below 100 ºC!
  
  

EQ-SPC2-ARSC