AlN Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method. AlN template is a cost effective way to replace AlN single crystal substrate.
Specifications
• Sizes: 2" round
• Substrate SapphireOrientation: C plane 0.20° offcut towards m-plane
• Type and Doping for the AlN film Undoped
• Macro Defect Density: <5 cm-2
• Front Surface Finish (Al Face): As-grown
• Back Surface Finish Sapphire: as-received finish