AlN Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method.
AlN template is a cost effective way to replace AlN single crystal substrate.
Specifications
• Aluminum Nitride Template: 4'' diameter
• Nominal AlN thickness: 5000 nm +/- 10%
• Front Side Surface: As-grown
• Back Side Surface: Substrate as-received
• Edge Exclusion Area: 5 mm
• Macro Defect Density: <=5 cm-2
• Sahhpire Substrate, Diameter: 100 +/- 0.2 mm
• Sapphire Substrate, Orientation: C-plane off 0.20 +/- 0.1 deg to M-plane
• Surface Finish: Single side polished
Related data
For Surface Rughness and XRD data, Please click here.