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AlN Template on Silicon
AlN Template on 4" Silicon ( Si <111>, P type, B-doped ) 4"x 500 nm
AlN Template on Silicon is made by a PVDNC method.
AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- • Useful area: 90%
• Nominal AlN thickness: 500nm ±10%, one side coated, undoped AlN film • Front Surface: as-grown • Back surface: silicon as received • AlN orientation: C-plane (00.1) • Macro Defect Density: <10/cm^2 • Wafer base: Silicon [111] P type, 4" dia x0.5 mm, , one side polished,R<5 ohm.cm
Related data
•  AlN MSDS
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AlN MSDS
