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AlN Template on Silicon
Undoped AlN Template on 2" Silicon ( Si <111> N type ) 2"x 500 nm
AlN Template on Silicon is made by a PVDNC method.
AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- • Useful area: 90%
• Nominal AlN thickness: 500nm ±10%, one side coated, undoped AlN film • Front Surface: <1nm RMS, as-grown • Back surface: silicon N-type • AlN orientation: C-plane (00.1) • Macro Defect Density: <1/cm^2 • Wafer base: Silicon [111] N type, 2" dia x0.5 mm, , one side polished
Related data
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Working days : Monday to Saturday
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