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AlN Template on Silicon
Undoped AlN Template on 2" Silicon ( Si <111> , N type ) 2"x 200 nm
AlN Template on Silicon is made by a PVDNC method.
AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- • Useful area: 90%
• Nominal AlN thickness: 200nm ± 5%, one side coated, undoped AlN film • Front Surface: As-grown • Back surface: Silicon as received • AlN orientation: C-plane (00.1) • Macro Defect Density: <5/cm^2 • Wafer base: Silicon [111] N type, 2" dia x0.5 mm, Resistivity: <5 ohm-cm, one side polished
Related data
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Working days : Monday to Saturday
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