| |
AlN Template on Silicon
Undoped AlN Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm
AlN Template on Silicon is made by a PVDNC method.
AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- Useful area: 90%
- Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
- Front Surface: <1nm RMS, as-grown
Back surface: silicon as received AlN orientation: C-plane (00.1) Macro Defect Density: <1/cm^2 Wafer base: Silicon [111] P-type, 5x5 x0.5 mm, one side polished
Related data
|
|
|
Working days : Monday to Saturday
|
|
|
