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AlN Template on Silicon
Undoped AlN Template on Silicon ( Si <111> P type ) 10mmx10mm x 200 nm
AlN Template on Silicon is made by a PVDNC method.
AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- • Useful area: 90%
- • Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
- • Front Surface: <1nm RMS, as-grown
• Back surface: silicon as received • AlN orientation: c-plane (00.1) • Macro Defect Density: <1/cm^2 • Wafer base: Silicon [111] P-type, 10x10 x0.5 mm, one side polished
Related data
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Working days : Monday to Saturday
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