One side EPI polished by CMP technology with minimum sub-surface damage.
Surface finish (RMS or Ra)
< 10A ( By AFM 5x5 um2 )
Packing
The substrate is packed with 100 grade clean plastic bag under 1000 class clean room.
Precautions
MgO is sensitive to moisture, and must be stored in vacuum box. Otherwise surface rougness may be damaged
W
arning:
MgO crystal was grown by arc melting method and nature cooling. It is difficult to get uniform perfect crystal bulk. Please check rocking curve for each substrate before depositing film. We can provide rocking curve service at $50 each if some one has no capability to inspect.
