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ZnO thin film on Sapphire
ZnO Film (0.5 um) on Sapphire(0001), 5x5x0.5mm ,1sp, undoped
ZnO Epi Template Specifications:
• Film: ZnO film
- º Film thickness: 500 nm ( 0.5 um)
- º Total Thickness Variation: 5%
- º Resistivity: 10--1000 ohm-cm
- º Film orientation: <0001>
- º Film quality: as grown << Directioanl grown along <0001> with 50 arc seconds by double crystal x-ray diffraction
- • Al2O3 substrate
5 x 5 x 0.5 mm , <0001>orientation - • Polish: one side polished
- • Surface roughness: < 5A
- • Optional: you may need tool below to handle the wafer ( click picture to order )
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