Furnace and Preheater
| - º Water cooling flange on left-side between the heater and furnace is used for
pre-heated gas input and sealing
- • Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange
• One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,
or evaporate solid chemical, which will be then delivered to CVD furnace:
Please click picture left for more details:- º 1.2''O.D x 6''L SS tube as the heating chamber
- º 600ºC Max. working temperature
- º Flange on the left side is for gas sealing and input
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| Rated Voltage | Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug) |
| Power consumption | Max. 3600 W (20 A breaker required) |
Heating Zone |
• CVD Furnace: 440 mm- • Constant temperature zone: 100 mm
- • Gas Heater: 150mm
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Working Temperature |
• CVD Furnace:- º Max heating temperature: 1100°C ( < 2 hour )
- º Continuous working temperature: 200~1000°C
- º Max heating & cooling rate: 20°C/min
- • Heater:
- º Continuous working temperature: RT~600°C
- º Max heating & cooling rate: 20°C/min
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Temperature Control
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• CVD Furnace and Heater (separate temp control):- º Digital controllers with PID/self-tuning functions and 30 segments programmable
- º Thermocouple: K type thermocouples, which feed through the right side flange and
control furnace temperature. - º Control accuracy: +/- 1°C
- º RS485 Communications Port
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Vacuum
and Gas Sealing & Flange
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The right flange of CVD furnaceLeft flange (between CVD Furnace and Heater) with four 1/8'' Swagelok fittings for 1/8'' tube:
- • Two 1/8'' fitting on the flange for independently and directly delivering any gas into the
CVD furnace - • One 1/8'' fitting for delivering heated gas from heater to CVD furnace
- • One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace
(inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)
Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:- • One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)
- • Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left
the flange - • These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than
sample holder - • These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck
or corroded
Heater:- • Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to
CVD furnace - • On the right side to CVD furnace with necessary thermal block material to minimize the
temperature gradient at the interface between the heater and CVD furnace - • Furnace Chamber Installation
- • 2- 1/4" pipe adapter is installed on each flange
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The optional Liquid Injection device |
For direct liquid CVD ( DLCVD), you may consider below devices for liquid injection: ( click Pic to order )
  
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Net weight
| 110kg
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Dimensions
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• Standard: 62"L X 18"W X 23"H- • Maximum: 80"L X 18"W X 32"H (Lid open and right-side flange slided out)
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Warranty
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• One year limited warranty for electrical parts. ( Consumable parts such as processing tubes,
o-rings and etc are not covered by the warranty)- • You may order replacement quartz tube here: EQ-QZTube-SF
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Laptop, software & WiFi Control (Optional)f |
• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial)
for immediate use.- • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit
temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. - • A wireless remote control provides up to 300 meters operating range.
- • Above features are available upon request at an extra cost (up to $1,000). Please contact
us for more information. - • Note: The software is only compatible with MTI’s Yudian Temperature Controller
 
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Compliance
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• CE Certified- • NRTL(UL61010) or CSA certifications are available at extra cost.
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Warning
Click here to learn the installation of a gas regulator
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• The tube furnaces with quartz tube are designed for use under vacuum and low pressure
<0.2 bars - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas
regulator. - • Vacuum pressures may only be safely used up to 1000°C
- • The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the
tube
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Operation Demo Video & Instructions
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