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Single-zone Tube Furnace with High Vacuum (1E-5 torr) & 3 Channel Precision Gas Flow Station for CVD - OTF-1200X-HVC3-UL series

Single-zone Tube Furnace with High Vacuum (1E-5 torr) & 3 Channel Precision Gas Flow Station for CVD - OTF-1200X-HVC3-UL series

기본 정보
Product Name Single-zone Tube Furnace with High Vacuum (1E-5 torr) & 3 Channel Precision Gas Flow Station for CVD - OTF-1200X-HVC3-UL series
Sale Price Call for Price
Product Code OTF1200XC3HV
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(* denotes required field)Upgrade to Eurotherm Temp. Controller

Personalization

Select quartz tube

 

The OTF-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

SPECIFICATIONS:


OTF-1200X series tube furnace


Casing


  •      •  Double layer steel casing with air cooling.
  •      •  Built-in thermostat to control Cooling running automatically
             when case > 55°C.



Processing Tube


Material: Fused quartz tube

One processing tube is included with the furnace.
Please select the tube size in the optional bar to update the price.
Thermal block placement

Power2.5KW
Rated VoltageAC 208-240V Single phase, 50/60Hz
Heating ElementFe-Cr-Al Alloy doped by Mo

Working Temp.


Max. Heating Temp.: 1200°C

Continuous Working Temp.: 1100°C

Heat-up RateHeat-up rate: 1~20°C/min programmable

Heating Zone Length

Total heating zone: 440mm

Constant Temp. Zone: 150mm (±1°C)


Temp. Control

  •      •  PID automatic control with 30 steps programmable segments.
  •      •  Temperature accuracy: ±1°C
  •      •  Thermocouple: K type built inside the furnace


Vacuum Seal

  •      •  One pair of stainless steel vacuum flange with:
    •          º   one mechanical pressure gauge
    •          º   two needle valves
    •          º  one KF-25 connector for the high vacuum station.

Power100~110W
Rated VoltageAC 208-240V Single Phase, 50/60Hz

High Vacuum Station

Structure

Mobile cart size:  600 (L) x 600 (W) x 700(H), mm

Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included


Volume Flow Rate

Nitrogen   N2     33 L/s

Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s

Working RangeFrom 1000 mbar to <1E-7 mbar
Ultimate Pressure<1E-8 mbar (without any leaking )

Mass Flow Gas Control
EQ-GSL-LCD


Structure



Made of 316 stainless steel valve

Gas mixing tank: Φ80X120mm  
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.

Power23W per channel
Rated VoltageAC 220V/50Hz Single phase



Temperature Controller


  •      •  FA-YD518P-AG
     temperature controller is included.
  •      •  Proportional–integral–derivative control (PID control) and auto-tune function
  •      •  30 segments programmed with ramping, cooling and dwelling steps
  •      •  Built-in over-temperature alarm and thermocouple failure alarm
  •      •  +/- 1 ºC temperature control accuracy
  •      •  Default DB9 PC communication port
  •      •  MET Certified


Temperature controller (optional)



  •      •  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop
            package  is available at the options bar.
           Click for the detail information about the MTS02-Y software kit.
  •      •  You may upgrade the temperature controller to the Eurotherm 3504 Temperature
            Controller
     which is fully compatible with LabVIEW. This package includes a Eurotherm 3504
             programmer, a communication cable (RS485 - USB) and a software CD.
            Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
         


Optional
                     


Warning

Click here to learn the
installation of a gas
regulator


  •      • 
    The tube furnaces with quartz tube are designed for using under vacuum and low pressure
            < 0.2 bars / 3 psi / 0.02 Mpa
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
            the pressure to below 3 PSI for safe operation.
     
    Click here to learn the installation of a gas
           regulator
    .
  •      •  The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
            shocks to the tube
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
             used up to 1000°C

WarrantyOne year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)

Compliance

  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified, but not including the gas
            mixing system nor vacuum system.
  •      •  The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 
         ( pls click marks below to learn details )

                             


Operation Instructions