| Power | |
| Frequency Range | |
| Frequency Resulution | |
| Measurement Speed | - • Up to 10 measurements per second
|
| Reference Frequency Stability | |
Thickness and Rate Resolution
| - • +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
|
Display Resolution
| |
| Operating Temperature | |
| Water Flow Requirement | - • Minimum water flow 150-200 cc/min, 30° C max
|
| Water Feedthrough | - • 2 pass water 3/16 in. (4.8 mm) O.D. tubing
|
Standard Package |
• Sensor with the quartz holder is included.- • 6″ BNC Cable M/F is included
- • SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition
systems, a feedthrough with SMA female (in the deposition chamber) to BNC female (outside
chamber) adapter) - • Gold quartz crystals of one set (10 PCS) is included.
 |  |  |  | | Quartz holder | 6″ BNC-J3 Female to
SMA-J3 Female Cable
| SMA Bulkhead Adaptor | Gold quartz crystals |
|
Quartz Crystals (Optional)
 | | Alloy |
|
• Starting frequency: 6 MHz- • Crystal size: 14 mm Dia.
- • Anchor electrode pattern for maximum crystal stability and life
- • Gold and alloy electrode quartz crystals can be ordered at MTI
(Click pictures below or select product options) - • Choose the quartz crystal with the right electrode material for your application -
gold, silver, alloy - º Recommend gold electrode crystals for most applications
- º Silver electrode crystals work well for processes with high heat loads, such as
sputtering - º Alloy electrode crystals are recommended for high-stress deposition, such as optical
coating with dielectric materials and semiconductor processes with high-stress
materials
|
| Operating System | - • Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
|
Software | |
Installation |
 
|
| Compliance | CE Certificated (Assembled in the USA) |
| Monitor Size | - • 114 mm L x 76 mm W x 25 mm H
|
| Monitor Weight | |
| Warranty | - • One year limited warranty with lifetime support
|
| Operation Instructions |  |
Application Notes
|
• If you need test the resistance of a coating of the electrode to cracking or detachment from a
substrate, Please click to order Flexibility Tester.- • If you need a customized feedthrough, please email us for more information.
 |  |  | 
| | Drawing | FlexibilityTest | Applcation for Sputtering |
|
