Thin Film Measurement

Alloy Quartz Crystal for High Stress Deposition, EQ-QC-ALLOY-LD

Alloy Quartz Crystal for High Stress Deposition, EQ-QC-ALLOY-LD

기본 정보
Product Name Alloy Quartz Crystal for High Stress Deposition, EQ-QC-ALLOY-LD
Sale Price Call for Price
Product Code TMQC-Alloy
Quantity 수량증가수량감소
상품 옵션
 
   Dimension
  •      •  14 mm Dia.
   Electrode Material
  •      •  Alloy
   Sensor and Monitor
  •      •  MTI thin film thickness monitor - EQ-TM106-LD

   Life Time

  •      • 
    Quartz crystals are consumable parts, no warranty of any kind
  •      •  Please note the crystal life form the thickness monitor


   Typical Applications

  •      •  Designed for high-stress depositions, such as
    optical coating with dielectric materials and
            semiconductor processes with high-stress
    materials
  •      •  DC Sputtering
  •      •  RF Sputtering
  •      •  Thermal Evaporation
  •      •  Ion Plating
  •      •  Anticorrosive Coating


   Application Notes

  •      •  Choose the quartz crystal
     with the right electrode material for your application - gold, silver, alloy:
    •          º  Recommend gold electrode crystals for most applications
    •          º  Silver electrode crystals work well for processes with high heat loads, such as sputtering
    •          º  Alloy electrode crystals are recommended for high-stress deposition, such as optical
                  coating with dielectric materials and semiconductor processes with high-stress materials


   Notes

    •     •  The recommended distance from source to sensor is 12 inch
    •      •  Avoid source splatter and heat load to the crystal.
    •      •  Additionally, please take notice of the bend radius dependent on the sensor that is ordered.