400-1200ºC Max. Muffle Furnaces UL/CSA Ready

1100°C 7.6 Liter Vacuum Chamber Furnace with feedthrough flange - VBF-1200X-H8

1100°C 7.6 Liter Vacuum Chamber Furnace with feedthrough flange - VBF-1200X-H8

기본 정보
Product Name 1100°C 7.6 Liter Vacuum Chamber Furnace with feedthrough flange - VBF-1200X-H8
Sale Price Call for Price
Product Code VBF-1200X-H8
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
UL/CSA/CE Certifications

Vacuum Gauge

Personalization(Upgrade to Eurotherm Temperature controller)

VBF-1200X-H8 is a UL/CSA standard vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 Torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as vacuum brazing furnace for fusing small parts.



  •      •  Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  •      •  3 KW max.
  •      •  Note: Power cable included, but without the plug. Please install a plug by your own or click
            link below the picture to choose a plug according to your country or your lab  requirement


Working Temperature

  •      •  <= 1000 °C continuously

  •      •  Max. 1100 °C, < 30 minutes
  •      •  Temperature Uniformity: +/- 2°C

Heating Rate

  •      •  Max. 20°C/ min
  •      •  Recommended. 10°C/ min

Heating Elements    

High-quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200°C.

Quartz Tube Size &
Effective Heating Area

  •      •  Tube size: 8" O.D. x 7.5" I.D x 13.4" L.

  •      •  Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  •      •  Uniform Temperature zone:  4"Dia x 3.5" depth in center position within +/- 5ºC

  •      •  The quartz tube is replaceable  ( click picture left to order spare tube )

Vacuum Flange
(with dual 1/4" feedthrough ports)

Note: The standard flange door has upgraded to feedthrough type on Feb 15, 2016.

  •      •  Stainless steel vacuum flange with dual high-temperature silicone O-rings at the front door.
    •          º  One 1/4 gas inlet which allows continuous gas delivery during operation. A gas quartz
                   tube (6.35mm O.D) is provided to reach the location of the sample and deliver
                   reactive gas to sample directl
      y. (Fig A, B)
    •          º  One 1/4 thermocouple feedthrough port allows a 1/4 O.D thermocouple probe to be
                   inserted into the chamber
       and measure the temperature of the sample independently.
                  (Fig. C) (Thermocouple is optional. Click
       here to find one). Four probes electric
                  resistance measurement feedthrough also is available upon request. (Fig. D)
    •          º  M15 x 1.5mm Thread for both 1/4" feedthrough
    •          º  One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)
  •      •  K type 1/4" OD x 18" L thermocouple is included.    (Since Apr 2016) (Fig. C)
  •      •  Gas Inlet Tube (O.D 6.35mm, I.D 4.0 mm, L 300mm) is included.    (Since Apr 2016)

         Fig. A                 Fig. B                         Fig. C                 Fig. D                         Fig. F


  •      •  The sample holder is not provided with the furnace. You may check the link below to order
             the sample holder separately.
  •      •  Optional Quartz Thermal Block is available upon request as the refractory block, which can
            help achieve higher vacuum level and avoid potential contamination problems
     please order
            Quartz Thermal Block.
  •      •  Optional 4 wires ( Pt ) feedthrough is available upon request for electrical properties
            measurement at the high temperature at extra cost.
                        Flat sample holder     Crucible sample holder     Quartz Thermal Block    4 wires feedthrough

Gas Inlet and Outlet

  •      •  One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace
  •      •  The inert gas can be introduced into the chamber via the inlet for purging purpose.
  •      •  If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple

Water Cooling

A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of the furnace are used for
connecting to a water chiller through two 12 mm Dia. polyurethane tubes (water chiller is sold separately). Please click the picture below left to order the water chiller.

Pressure Measurement / Monitoring

  •      •  Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to
  •      •  Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum
            gauge with a wide range between 3.8x10
    -5 to 1125 Torr. Aside from greater measurement
            precision, this gauge reduces risks of chamber explosions
     caused by the incorrect reading
            of gas pressures due to gas-type dependency.

Vacuum Pressure

  •      •  Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory
            block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical
            pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    •          º  10-2 torr via mechanical pump within 30 minutes without thermal Block
    •          º  10-6  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C

  •      •  Optional:
    •          º  Vacuum pump and pipe are not included, please click on BOLD or picture on the
                   optional part below to order.
    •          º  For achieving a higher vacuum level, a Turbomolecular Vacuum Pump Station is
       ( click the bottom left picture to see detailed specs )
    •          º  Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
    •          º   KF25 Right-Angle Valve for quick connection to KF25 Bellows
                   (click the picture 3 below ).

Temperature Controller

  •      •  FA-YD518P-AG
     temperature controller is included.
  •      •  Proportional–integral–derivative control (PID control) and auto-tune function
  •      •  30 segments programmed with ramping, cooling and dwelling steps
  •      •  Built-in over-temperature alarm and thermocouple failure alarm
  •      •  +/- 1 ºC temperature control accuracy
  •      •  Default DB9 PC communication port

Temperature controller (optional)

  •      •  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop
            package is available at the options bar.
           Click for the detail information about the MTS02-Y software kit.
  •      •  You may upgrade the temperature controller to the Eurotherm 3504 Temperature
     which is fully compatible with LabVIEW and provides +/- 1°C accuracy.
            This package includes a Eurotherm 3504 programmer, a communication cable
            (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm
            3504 temperature controller.

Gas Mixing System (optional)

You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).

New Version front panel

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)  

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H)


  •      •  One year limited warranty with lifetime support (consumable parts such as processing
             tubes, and O-rings are not covered by the warranty, please order replacements at related
             products below.)
  •      •  ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not
            under the coverage of MTI One Year Limited Warranty.


  •      •  CE Certified
  •      •  Patten Number : ZL-2011-2-0102249.4 SINCE  2011-5-19
  •      •  NRTL or CSA certification is available upon request at extra cost. 


    Click here to learn the
    installation of a gas regulator

    •      •  Tube furnaces with quartz tubes are designed for use under vacuum condition and at low-
              pressure levels <  0.2 bars  ( 3 PSI ).
    •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
              pressure to below 3 PSI for safe operation.
      Click here to learn the installation of a gas regulator.
    •      •  Never heat the furnace while the gas release valve is closed and a positive pressure condition
              exists within the furnace chamber. The pressure gauge must be used to closely monitor the
              chamber condition at all times during the heating process; please open the gas release valve
              immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable
    •      •  A maximum temperature of 1000°C should be imposed on all quartz tube furnaces while
              running a vacuum to ensure safe operation. Temperatures beyond 1000°C could cause the
              quartz tubes to undergo deformations under vacuum.
    •      •  The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks to the
               tube ( with the output pressure of the gas tank regulated to < 0.2 Bar or < 3 PSI ).

    Operation Instructions

    & Demo video