Solid Tube Furnaces...

6" - 8.5" Quartz Tube Furnace with Water Cooling Flanges (1100 ºC , 24" heating zone) - GSL-1100X-6/8.5

6" - 8.5" Quartz Tube Furnace with Water Cooling Flanges (1100 ºC , 24" heating zone) - GSL-1100X-6/8.5

기본 정보
Product Name 6" - 8.5" Quartz Tube Furnace with Water Cooling Flanges (1100 ºC , 24" heating zone) - GSL-1100X-6/8.5
Sale Price Call for Price
Product Code GSL-1100X-6/8.5
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
tube size

Personalization(Upgrade to Eurotherm Temp. Controller)

 
GSL-1100X-6/8.5 is a ready-to-pass UL/CSA (UL61010 or SPE1000 certification) furnace. It is a single heating zone and adapts to various sizes of the quartz tube (6" or 8.5" outside diameter). The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built-in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with the accuracy of +/-1°C and 30 programmable segments.

SPECIFICATIONS:

ModelGSL-1100X-6GSL-1100X-8.5
Fused quartz tube sizeQuartz Tube:
152 OD x 143 IDx 1020L mm (6" x 5.6" x 40")
Quartz Tube:
216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L)

Furnace structure

  •      •  Double layer steel casing.
  •      •  Four cooling fans are built inside to keep the temperature of outside case < 60ºC
  •      •  High purity alumina fibrous insulation for max energy saving.
  •      •  Two foam ceramic thermal blocks are included, which must be placed inside the tube at two
             ends to block heat radiation

                             

Input voltage208 - 230VAC Single phase
power8kW (50Amps Air Breaker is required)
Heating elementNiCrAl Resistance Wire

Working Temperature

  •      •  Max. heating temperature: 1100°C
  •      •  Continuous working temperature: 400 -1050°C
  •      •  Max. heating/cooling rate: 20°C/min
  •      •  Recommended heating/cooling rate: 10°C/min
  •      •  Typical temperature profile at 800°C (click picture below to see detail)


Heating zone

  •      •  Total heating zone length: 600mm (24'')
  •      •  constant temperature zone: 200mm at the center (with +/-1°C)


Temperature Controller

  •      •  One Precision digital controller with PID function and 30 segments programmable
  •      •  Secondary temperature monitor has the function of protection from over-temperature and
             broken thermocouple
  •      •  K type thermocouple
  •      •  Temperature accuracy: +/-1°C
    •          º  Advanced Temperature Control (Optional)
    •          º  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15"
                  laptop package is available at the options bar.
                 Click for the detail information about the MTS02-Y software kit.
    •          º  You may upgrade the temperature controller to the Eurotherm 3504 Temperature
                 Controller
       which is fully compatible with LabVIEW. This package includes a Eurotherm
                   3504 programmer, a communication cable (RS485 - USB) and a software CD.
                   Click the pic below to view the full spec of Eurotherm 3504

                               


Vacuum & Fitting Ports


  •      •  One pair of hinged type stainless steel vacuum seal flange with water cooling ( see Pic.1 )
  •      •  One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose
             fittings, KF40 vacuum port and 1/4'' feedthrough (see Pic. 2 and Pic. 3). Vacuum pressure
             limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump).

                 Pic.1    Pic. 2            Pic. 3                         
   


Water Chiller (
Optional)


  •      •  Cooling water is required.
  •      •  Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure >
            25 PSI.
  •      •  We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system
            (please order separately
     here) to save water.
       

Product dimension1000L x 680W x 920 H  mm
Net weight250Kg
Shipping dimension60" x 60" x 55"
Shipping weight350Kg
WarrantyOne-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)

Compliance

         


  •      •  CE Certified
  •      •  NRTL or CSA cetification is available upon request.

Application Notes


                     Click here to learn the installation of a gas regulator

Warning:
 
  •      •  Tube furnaces with quartz tubes are designed for using under vacuum and low pressure
            <  0.2 bar / 3 psi / 0.02 MPa    or   0.12 MPa (absolute pressure).
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
            the pressure to below 3 PSI for safe operation.
     
            Click here to learn the installation of a gas regulator.
  •      •  Never heat furnace at positive pressure and close outlet valve condition. Once watch pressure
            gauge on furnace during heating, once pressure is over  3 PSI please open release valve
             immediately
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
            used up to 1000°C
  •      •  The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
             shocks to the tube.
  •      •  Please use the manual torque wrench to tighten all flange screws to avoid overpressure
             incidents. The recommended torque
     is 45 inch-lbs at max.


Demo Video

 
          -- Furnace in operation

 
CONSUMABLE PARTS LIST

No.   DescriptionQuantityPicture   GSL-1100X-6-S-UL   GSL-1100X-8.5-S-UL
01   Quartz tube1 pc   152 O.D x 143 I.D x 1300mm L
   (6" O.D x 5.6" I.D x 51" L)
   216 O.D x 206 I.D x 1300mm L
   (8.5" O.D x 8.1" I.D x 51" L)
02   Quartz Thermal Block1 pair

   EQ-QTB-6

   EQ-QTB-8
03   O ring for inner flange
2 pcs   EQ-SOR-152      EQ-SOR-213
04   O ring for flange cap
4 pcs   EQ-SOR-168   EQ-SOR-230
05   KF-40 quick clamp2 pcs

   EQ-KF-Clamp-D40

06   KF-40 right angle vacuum valve1 pcs

   EQ-KF-Valve-D40

07   KF-40 Blank flange2 pcs

   EQ-KF-BF

08   Manual torque wrench to prevent overtighten1 set


OPTIONAL ACCESSORY

   Part No.   DescriptionQuick Link

   EQ-VAC-   
 YTP550suite

   KF-D40 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter,
   KF40-25 Reducer )

   The items in the suite can be purchased individually.

   EQ-MTS02

   Computerized temperature Control System
    High vacuum station (Mechanical pump + turbo molecular pump)
    Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
    Quartz Boats /curcible /container /sample holder