Furnace Structure

1. 1. Heating Layer：  Center alumia tube  ( 20OD x  25 ID x 1200 L , mm ) with heating coil 
2. 2. Vacuum layer:     Quartz tube ( 80 mm dia.x 1000 mm L ) with vacuum sealed  and flange for thermal insulation
3. 3. Water cold layer: outer quartz tube  ( 100 mm dia. x1000 mm L ) to keep outside wall < 30ºC
4. 4. Outer Tube: 90mm O.D x 58mm I.D
5. 5. Inner SiC Sheath: 36mm O.D
   
   

 

• 
       •   208 - 240 VAC, single phase 
•      •   2000W
  
  

Working Temperature

• 
       •  Max. Temperature: 300 °C (< 1 hr)
•      •  Continuous working temperature: 250 °C
  
  

Heating Rate

•      •  Max. Heating Rate: 10°C /min

• 
       •  Heating Zone Length: 1000 mm 
  
•      •  Constant Temperature Zone:  700 mm within +/- 2oC
  
  

Temperature Controller

• 
       •  PID automatic control and auto-tune function.
•      •  30 programmable segments for precise process
•      •  Built in protection for overheated and broken Thermal couple. 
•      •  Temperature Accuracy: +/- 1 °C
•      •  K-type thermal couple 
  
  

• 
       •  Special flange for three layers tube is included
•      •  1" flange is included for center tube
  
  
•           1" Flange Set                
  
  

• 
       •  Both flanges will come standard with 3/8" barbed hose fittings
•      •  In order to increase the throughput and achieve a high vacuum, you may replace the standard barbed hose
          fitting with theKF25 adapter (please click the underline to order).
•      •  For supplying high-pressure gas, you may replace the standard barbed hose fitting with the 304SS 1/4"
         Swagelok® Tube Fitting x 1/4" BSPP Male Connector (please click the underline to order).
  
  

Vacuum Pressure

• 
       •  Limited by vacuum pump
•          º  50 mtorr can be achieved by mechanical pump
•          º  10^-5 torr can be reached by molecular pump
  
  
•      •      
  
  

Digital Pressure Gauge (optional)

Shipping Package Dimensions

Shipping Weight

Warranty

• 
       •  CE Certified
•      •  All electric parts are UL / MET / CSA certified
•      •  The furnace is ready to pass UL or CSA certification (UL61010 or SPE1000) on customer side at customer cost.

                            

Application Notes

Click here to learn the installation of a gas regulator

• 
       •  Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi /
          0.02 MPa
  
•      •  Attention: A two stage pressure regulator must be installed on the gas cylinder to limit
           the pressure to below 3 PSI for safe operation. 
             Click here to learn the installation of a gas regulator.
•      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
•      •  The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
•      •  Please click here to see our typical temperature profile calibration results at various temperatures.  
•      •  In order obtain accurate temperature inside tube furnace, please click here to learn how to calibrate the
          temperature on your own.
•      •  How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
  
  

Operation Instructions