Vertical & Quenching Furnaces (200 - 1200°C)

Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-III-50

Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-III-50

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Product Name Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-III-50
Sale Price Call for Price
Product Code OTF1200XIIIVT50
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15 Laptop + USB-to-RS485 Cable)

 

OTF-1200X-VT-III-50 is Three Heating Zone Split Vertical Tube Furnace with vacuum sealed 50 mm diameter quartz tube. Not only it can achieve faster sample heating and quenching in vacuum or gas flow, but also be used for PVD, CSS or CVD coating. Three precision temperature controllers provide 30 segments heating and cooling program with +/- 1°C accuracy independently. The vertical tube furnace is installed in a heavy-duty mobile cart for easy moving.

SPECIFICATIONS:


Furnace Structure


  •      •  Double layer steel structure with air cooling to keep case temperature <65°C
  •      •  High purity fibrous alumina insulation with a Special coating to ensure max. energy saving
  •      •  Foam ceramic blocks with alumina coating are included, which is hanged on top and bottom of
            flange to protec O-ring from damaged by heat radiation
    .
  •      •  The wheel is installed on the split top cover.

  •           

Power

4.8KW (30Amps circuit breaker is recommended)

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1200°C (<1 hr) each zone

Continuous Temperature

1100°C for each zone

Max. Heating Rate

<= 20°C/min.

Temperature Accuracy

+/- 1°C


Tube Size and Materials



  •      •  One 1200mm length quartz tube is included
  •      •  OD: 50 mm, ID. 44 mm
  •      •  Foam ceramic blocks with alumina coating are included, which is hanged on top of flange to
            protec O-ring damaged by heat radiation
  •      •  Upgrade note:
  •      •  ( Processing tube can be replaced by O.D. 50 mm mullite tube at extra cost, then furnace
             can be used upto 1250
    °C)


Heating Zone Length


  •      •  Top: 135 mm
  •      •  Middle: 260 mm
  •      •  Bottom: 135 mm
  •      •  Total: 530 mm

Constant Temperature Zone

  • Constant temperature zone: 400 mm (+/-1°C) if three heating zones are at the same temperature


Temperature Controller


  •      •  MET certified 30 programmable segments for precise control of heating rate, cooling rate and
            dwell time.
  •      •  Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  •      •  Over temperature protection and alarm allows for operation without attendant(s).
  •      •  RS485 Communication Port.
                 


Vacuum Sealing Flange



  •      •  Two stainless steel flanges with vacuum gauge and valves included
  •      •  A hook ring is welded inside the top flange for hanging thermal block or crucible by wireYou
            may choose any connectors (
    KF25D adapter, 1/4'' Swagelok Tube Fitting) as shown in
            the picture left at extra cost.


Vacuum Level


  •      •  10E-2 Torr by mechanical vacuum pump

  •      •  10E-5 Torr by molecular pump

  •      •   Leak rate < 5 mTorr / min.

Heating Element

1300°C Fe-Cr-Al Alloy doped by Mo


Dimensions


     •  500mm(L) x 430mm(W) x 880mm(H) exclude mobile cart
     •  700mm(L) x 700mm(W) x 1680mm(H) install with mobile cart

       

Net Weight

About 115 kg

Shipping Size

48"(L) x 40"(W) x 75''(H)

Shipping Weight

500 lbs

Warranty

One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.)


Laptop, software & WiFi Control(Optional)


  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial)
            for immediate use.

  •      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

  •      •  A wireless remote control provides up to 300 meters operating range.

  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.
  •      •  Note:
            The software is only compatible with MTI’s Yudian Temperature Controller

              


Compliance

  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified
  •      •  The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 
           ( please click marks below to learn details )
                             


Application Note
( We may help you to build customized flange to meet your application at extra cost )


  •      •  Customers may calibrate temperature before use to obtain accurate temperature inside tube
             furnace,
     please click here to learn how.
  •      •  Please click picture below to learn how to quench sample in gas flow and vacuum
    •          º  Approach#1: Traditional wire cut and free-falling  ( Fig. 1 & 2 )
    •          º  Approach#2: Electromagnetic release and free-falling. (Fig 3 & 4 )

                   
 
                       Fig. 1           Fig. 2                 Fig. 3

  •      •  The furnace ca be modified into a HPCVD ( hybrid physical-chemical vapor deposition ) furnace
             via DIY a sample susceptor ( click picture below-left to see how )
  •      •  The furnace can be used for brazing of two flat < 1"diameter sample via top dead weight under
             vacuum at <1000° ( click picture below -right to see how )


  •                


Operation Instructions

 
    
   


 Warning


Click here to learn more about the installation of a gas regulator.

 


  •      •  The tube furnaces with quartz tube are designed for using under vacuum and low pressure
             <
    0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C.
             The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) for reducing thermal
             shocks to the tube.
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
            the pressure to below 3 PSI for safe operation.
     
         Click here to learn the installation of a gas regulator.