Vertical & Quenching Furnaces (200 - 1200°C)

Two Heating Zones ( 1100°C) Split Vertical Tube Furnace with 4" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-II-100

Two Heating Zones ( 1100°C) Split Vertical Tube Furnace with 4" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-II-100

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Product Name Two Heating Zones ( 1100°C) Split Vertical Tube Furnace with 4" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-VT-II-100
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Product Code OTF1200XIIVT4
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Personalization(Upgrade to Eurotherm Temperature Controllers (Dual zone))

 

OTF-1200X-VT-II-100 is Two Heating Zone Split Vertical Tube Furnace with vacuum sealed 100mm diameter quartz tube. It can not only achieve faster sample heating and quenching in vacuum or gas flow but also be used for PVD, CSS or CVD coating. Two precision temperature controllers provide 30 segments heating and cooling program with +/- 1°C accuracy independently. The vertical tube furnace is installed in a heavy-duty mobile cart for easy moving.

SPECIFICATIONS:


Furnace Structure



  •      •  Double layer steel structure with air cooling to keep case temperature <65°C
  •      •  High purity fibrous alumina insulation with a Special coating to ensure max. energy saving
  •      •  Foam ceramic blocks with alumina coating are included, which is hanged on top
            and bottom of flange to protect O-ring from damaged by heat radiation
            ( click picture below for details)

Power

6KW (total) / each zone: 3KW

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1200°C (<1 hr) each zone

Continuous Temperature

1100°C for each zone

Max. Heating Rate

<= 20°C/min.

Temperature Accuracy

+/- 1°C


Tube Size and Materials


  •      •  One 1000mm length quartz tube is included
  •      •  OD: 100 mm, ID. 95 mm
  •      •  Foam ceramic blocks with alumina coating are included, which is hanged on top
            of flange to protect O-ring damaged by heat radiation
  •      •  Upgrade note:
  •      •  ( Processing tube can be replaced by mullite tube from 60 mm OD to 100 mm OD at extra
             cost, then furnace can be used up to 1250
    °C )


Heating Zone Length


  •      •  200mm ( bottom )
  •      •  200mm ( top )
  •      •  400mm ( total )

Constant Temperature Zone

  •      •  Constant temperature zone: 300 mm (+/-1°C) if two heating zones are at the same temperature


Temperature Controller


  •      •  MET certified 30 programmable segments for precise control of heating rate, cooling rate and
            dwell time.
  •      •  Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  •      •  Over temperature protection and alarm allows for operation without attendant(s).
  •      •  RS485 Communication Port.

               

       

Vacuum Sealing Flange



  •      •  Two stainless steel flanges with vacuum gauge and valves included
  •      •  A hook ring is welded inside the top flange for hanging thermal block or crucible by wireYou
           may choose any connectors (
    KF25D adapter, 1/4'' Swagelok Tube Fitting) as shown
           in the picture left at extra cost.


Vacuum Level


  •      •  10E-2 Torr by mechanical vacuum pump

  •      •  10E-5 Torr by molecular pump

  •      •   Leak rate < 5 mTorr / min.

Heating Element

1300°C Fe-Cr-Al Alloy doped by Mo


Dimensions


    •  
550mm(L) x 380mm(W) x 520mm(H) exclude mobile cart
     •  600mm(L) x 600mm(W) x 1200mm(H) install with mobile cart

Net Weight

About 80 kg (excluding mobile cart)

Shipping Size

48"(L) x 40"(W) x 72''(H)

Shipping Weight

400 lbs

Warranty

One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.)


Laptop, software & WiFi Control(Optional)


  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial)
            for immediate use.

  •      •  Labview Based Temperature Control System (EQ-MTS01)
     enables user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.
  •      •  Note:
            The software is only compatible with MTI’s Yudian Temperature Controller


              


Compliance

  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified
  •      •  The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 
           ( please click marks below to learn details )

                     


Application Note
( We may help you to build customized flange to meet your application at extra cost )


  •      •  Customers may calibrate temperature before use to obtain accurate temperature inside tube
             furnace,
     please click here to learn how.
  •      •  Please click picture below to learn how to quench sample in gas flow and vacuum
    •          º  Approach#1: Traditional wire cut and free-falling  ( Fig. 1 & 2 )
    •          º  Approach#2: Electromagnetic release and free-falling. (Fig 3 & 4 )

                            
 
                                 Fig. 1             Fig. 2              Fig. 3                   Fig. 4

  •      •  The furnace ca be modified into an HPCVD ( hybrid physical-chemical vapor deposition )
             furnace via DIY a sample susceptor ( click picture below-left to see how )
  •      •  The furnace can be used for brazing of two flat < 1" Diameter sample via top dead weight
             under vacuum at <1000° ( click picture below -right to see how )
  •      •  3 Zone heating  Zone vertical furnace is available using this furnace ( Pic right below)

  •                       


Operation Instructions  

&
Video

 
   
   


 Warning


Click here to learn more about the installation of a gas regulator.

 


  •      •  The tube furnaces with quartz tube are designed for using under vacuum and low pressure
             <
    0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C.
             The flow rate for gasses should be limited to < 200 SCCM (or 200ml/min) for reducing
             thermal shocks to the tube.
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to
            limit the pressure to below 3 PSI for safe operation.
     
            Click here to learn the installation of a gas regulator.